Patent Assignment Details
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| Reel/Frame: | 013877/0133 | |
| Pages: | 4 |
| | Recorded: | 10/30/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/18/2003
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Application #:
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10283688
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Filing Dt:
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10/30/2002
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Title:
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INTEGRATED PROCESS TOOL MONITORING SYSTEM FOR SEMICONDUCTOR FABRICATION
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Assignee
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| 1551 MCCARTHY BOULEVARD |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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LSI LOGIC CORPORATION
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TIMOTHY R. CROLL
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1551 MCCARTHY BOULEVARD
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MS/D-106
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MILPITAS, CA 95035
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