Patent Assignment Details
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| Reel/Frame: | 013886/0755 | |
| Pages: | 3 |
| | Recorded: | 03/24/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/10/2004
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Application #:
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10359081
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Filing Dt:
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02/06/2003
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Publication #:
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Pub Dt:
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08/14/2003
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Title:
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RF PLASMA PROCESSING METHOD AND RF PLASMA PROCESSING SYSTEM
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Assignee
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| 8-1, YOTSUYA 5-CHOME, FUCHU-SHI |
| TOKYO, JAPAN |
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Correspondence name and address
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KANESAKA & TAKEUCHI
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MANABU KANESAKA
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1423 POWHATAN STREET
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ALEXANDRIA, VA 22314
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