Patent Assignment Details
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| Reel/Frame: | 013889/0117 | |
| Pages: | 2 |
| | Recorded: | 09/16/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10221669
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Filing Dt:
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09/16/2002
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Title:
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ELECTRON BEAM LITHOGRAPHY DEVICE AND DRAWING METHOD USING ELECTRON BEAMS
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Assignee
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| 6, KANDA SURUGADAI 4-CHOME |
| CHIYODA-KU, TOKYO 101-8010, JAPAN |
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Correspondence name and address
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DICKENSTEIN SHAPIRO MORIN ET.AL.
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MARK J. THRONSON
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2101 L STREET, N.W.
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WASHINGTON, D.C. 20037-1526
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