Patent Assignment Details
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| Reel/Frame: | 013896/0476 | |
| Pages: | 3 |
| | Recorded: | 03/21/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10393283
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Filing Dt:
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03/21/2003
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Publication #:
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Pub Dt:
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10/02/2003
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Title:
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High selective ratio and high and uniform plasma processing method and system
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Assignees
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| 2500 HAGISONO |
| CHIGASAKI-SHI, KANAGAWA, JAPAN |
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| 2804, TERAO |
| CHICHIBU-SHI, SAIYAMA, JAPAN |
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Correspondence name and address
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LARSON & TAYLOR
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ROSS F. HUNT
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1199 FAIRFAX ST.
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SUITE 900
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ALEXANDRIA, VA 22314-1437
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