Patent Assignment Details
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Reel/Frame: | 013904/0551 | |
| Pages: | 3 |
| | Recorded: | 04/01/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/09/2004
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Application #:
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10334882
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Filing Dt:
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12/31/2002
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Title:
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METHODS AND APPARATUS FOR OFF-AXIS LITHOGRAPHIC ILLUMINATION
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Assignee
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2200 MISSION COLLEGE BLVD. |
SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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MARSHALL, GERSTEIN & BORUN
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AARON M. PETERS
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233 S. WACKER DRIVE, SUITE 6300
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SEARS TOWER
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CHICAGO, IL 60606-6357
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