Patent Assignment Details
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Reel/Frame: | 013912/0565 | |
| Pages: | 3 |
| | Recorded: | 03/25/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10396148
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Filing Dt:
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03/25/2003
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Publication #:
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Pub Dt:
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10/02/2003
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Title:
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Sputtering target for depositing silicon layers in their nitride or oxide form and process for its preparation
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Assignee
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HERAEUSSTRASSE 12-14 |
DE-63450 HANAU, GERMANY |
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Correspondence name and address
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SMITH, GAMBRELL & RUSSELL, LLP
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ROBERT G. WEILACHER
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SUITE 3100, PROMENADE II
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1230 PEACHTREE ST, N.E.
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ATLANA, GA 30309-3592
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