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Patent Assignment Details
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Reel/Frame:014065/0018   Pages: 3
Recorded: 05/09/2003
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10435118
Filing Dt:
05/09/2003
Publication #:
Pub Dt:
01/29/2004
Title:
Method for achieving process uniformity by modifying thermal coupling between heater and substrate
Assignors
1
Exec Dt:
05/08/2003
2
Exec Dt:
05/07/2003
Assignee
1
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
APPLIED MATERIALS INC.
ROBERT W. MULCAHY
P.O. BOX 450A
SANTA CLARA, CA 95052

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