Patent Assignment Details
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| Reel/Frame: | 014068/0868 | |
| Pages: | 2 |
| | Recorded: | 05/15/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/08/2006
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Application #:
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10308016
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Filing Dt:
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12/03/2002
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Publication #:
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Pub Dt:
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11/13/2003
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Title:
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ION BEAM IRRADIATION APPARATUS FOR SUPPRESSING CHARGE UP OF SUBSTRATE AND METHOD FOR THE SAME
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Assignee
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| 47, UMEZU TAKASE-CHO, UKYO-KU |
| KYOTO-SHI, KYOTO, JAPAN 615-8686 |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW ET AL.
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ERNEST F. CHAPMAN
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1300 I STREET, N.W.
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WASHINGTON, DC 20005-3315
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