Patent Assignment Details
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| Reel/Frame: | 014096/0243 | |
| Pages: | 3 |
| | Recorded: | 05/19/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10328806
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Filing Dt:
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12/23/2002
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Publication #:
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Pub Dt:
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06/24/2004
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Title:
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Method of making semiconductor devices using carbon nitride, a low-dielectric-constant hard mask and/or etch stop
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Assignee
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| 2200 MISSION COLLGE BLVD. |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP
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EDWIN H. TAYLOR
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12400 WILSHIRE BOULEVARD, 7TH FLOOR
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LOS ANGELES, CALIFORNIA 90025
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