Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 014127/0858 | |
| Pages: | 3 |
| | Recorded: | 05/27/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/12/2005
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Application #:
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10446878
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Filing Dt:
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05/27/2003
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Publication #:
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Pub Dt:
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11/20/2003
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Title:
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APPARATUS FOR MONITORING A METAL LAYER DURING CHEMICAL MECHANICAL POLISHING USING A PHASE DIFFERENCE SIGNAL
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Assignee
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| 3050 BOWERS AVE |
| M/S 2061 |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY
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PATENT COUNSEL, M/S 2061
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PO BOX 450-A
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SANTA CLARA, CA 95052
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