Patent Assignment Details
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| Reel/Frame: | 014159/0968 | |
| Pages: | 5 |
| | Recorded: | 05/20/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10441642
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Filing Dt:
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05/20/2003
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Publication #:
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Pub Dt:
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11/27/2003
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Title:
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REDUCED CROSS-CONTAMINATION BETWEEN CHAMBERS IN A SEMICONDUCTOR PROCESSING TOOL
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Assignee
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| 3440 E. UNIVERSITY DRIVE |
| PHOENIX, ARIZONA 85034-7200 |
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Correspondence name and address
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KNOBBE, MARTENS, OLSON & ET AL
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2040 MAIN STREET
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FOURTEENTH FLOOR
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IRVINE, CA 92614
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