Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 014209/0180 | |
| Pages: | 12 |
| | Recorded: | 12/19/2003 | | |
| Conveyance: | SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
9
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10103015
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Filing Dt:
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03/22/2002
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Publication #:
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Pub Dt:
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09/25/2003
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Title:
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APPARATUS AND METHOD FOR ELECTROLESS DEPOSITION OF MATERIALS ON SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
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01/25/2005
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Application #:
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10242331
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Filing Dt:
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09/13/2002
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Publication #:
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Pub Dt:
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03/18/2004
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Title:
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METHOD AND APPARATUS FOR ELECTROLESS DEPOSITION WITH TEMPERATURE-CONTROLLED CHUCK
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Patent #:
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Issue Dt:
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06/21/2005
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Application #:
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10247895
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Filing Dt:
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09/20/2002
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Publication #:
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Pub Dt:
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05/06/2004
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Title:
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TEMPERATURE-CONTROLLED SUBSTRATE HOLDER FOR PROCESSING IN FLUIDS
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Patent #:
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Issue Dt:
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09/06/2005
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Application #:
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10299069
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Filing Dt:
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11/19/2002
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Publication #:
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Pub Dt:
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05/20/2004
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Title:
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SPATIALLY-ARRANGED CHEMICAL PROCESSING STATION
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Patent #:
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Issue Dt:
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06/26/2007
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Application #:
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10299070
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Filing Dt:
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11/19/2002
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Publication #:
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Pub Dt:
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05/20/2004
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Title:
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Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth
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Patent #:
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Issue Dt:
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04/19/2005
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Application #:
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10462167
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Filing Dt:
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06/16/2003
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Publication #:
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Pub Dt:
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12/16/2004
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Title:
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METHODS AND SYSTEM FOR PROCESSING A MICROELECTRONIC TOPOGRAPHY
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Patent #:
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Issue Dt:
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03/01/2005
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Application #:
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10462180
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Filing Dt:
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06/16/2003
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Publication #:
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Pub Dt:
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12/16/2004
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Title:
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MICROELECTRONIC FABRICATION SYSTEM COMPONENTS AND METHOD FOR PROCESSING A WAFER USING SUCH COMPONENTS
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Patent #:
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Issue Dt:
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02/08/2011
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Application #:
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10462343
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Filing Dt:
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06/16/2003
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Publication #:
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Pub Dt:
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12/16/2004
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Title:
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METHOD FOR STRENGTHENING ADHESION BETWEEN DIELECTRIC LAYERS FORMED ADJACENT TO METAL LAYERS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10624397
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Filing Dt:
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07/22/2003
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Publication #:
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Pub Dt:
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01/27/2005
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Title:
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Multi-staged heating system for fabricating microelectronic devices
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Assignee
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| 160 RIO ROBLES |
| SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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HALE AND DORR LLP
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MICHAEL J. BEVILACQUA, ESQUIRE
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60 STATE STREET
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BOSTON, MA 02109
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