Patent Assignment Details
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Reel/Frame: | 014247/0396 | |
| Pages: | 2 |
| | Recorded: | 06/27/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10608871
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Filing Dt:
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06/27/2003
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Publication #:
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Pub Dt:
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12/30/2004
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Title:
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Method and apparatus for removing a target layer from a substrate using reactive gases
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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MARTINE & PENILLA, LLP
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MICHAEL K. HSU
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710 LAKEWAY DRIVE, SUITE 170
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SUNNYVALE, CA 94085
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