Patent Assignment Details
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| Reel/Frame: | 014288/0567 | |
| Pages: | 4 |
| | Recorded: | 01/23/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10654804
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Filing Dt:
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09/03/2003
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Publication #:
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Pub Dt:
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06/17/2004
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Title:
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Charged-particle-beam microlithography systems that detect and offset beam-perturbing displacements of optical-column components
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Assignee
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| FUJI BUILDING, 2-3 |
| MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN, LLP
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DONALD L. STEPHENS JR.
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121 S.W. SALMON STREET
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ONE WORLD TRADE CENTER, SUITE 1600
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PORTLAND, OR 97204-2988
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