Patent Assignment Details
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| Reel/Frame: | 014353/0879 | |
| Pages: | 3 |
| | Recorded: | 08/06/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/04/2011
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Application #:
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10445146
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Filing Dt:
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05/23/2003
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Publication #:
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Pub Dt:
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04/22/2004
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Title:
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MULTI-PART ELECTRODE FOR A SEMICONDUCTOR PROCESSING PLASMA REACTOR AND METHOD OF REPLACING A PORTION OF A MULTI-PART ELECTRODE
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94358 |
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Correspondence name and address
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BURNS, DOANE, & SWECKER & MATHIS, L.L.P.
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PETER K. SKIFF
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P.O. BOX 1404
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ALEXANDRIA, VA 22313-1450
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