Patent Assignment Details
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| Reel/Frame: | 014356/0014 | |
| Pages: | 2 |
| | Recorded: | 07/28/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/14/2005
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Application #:
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10627734
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Filing Dt:
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07/28/2003
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Publication #:
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Pub Dt:
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01/29/2004
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Title:
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METHOD FOR ESTIMATING REMAINING FILM THICKNESS DISTRIBUTION, METHOD FOR DESIGNING PATTERNING MASK USING THE METHOD FOR ESTIMATING REMAINING FILM THICKNESS DISTRIBUTION, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES BY USING PATTERNING MASK DESIGNED BY USING TH
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Assignee
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| 7-12, TORANOMON 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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VOLENTINE FRANCOS, PLLC
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ANDREW J. TELESZ, JR.
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12200 SUNRISE VALLEY DRIVE, SUITE 150
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RESTON, VA 20191
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