Patent Assignment Details
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| Reel/Frame: | 014422/0564 | |
| Pages: | 3 |
| | Recorded: | 03/14/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/04/2006
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Application #:
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10380428
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Filing Dt:
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03/14/2003
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Publication #:
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Pub Dt:
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05/20/2004
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Title:
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HIGH SPEED SILICON ETCHING METHOD
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Assignees
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU |
| TOKYO 105-8001, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, ET. AL.
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C. IRVIN MCCLELLAND
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1940 DUKE STREET
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ALEXANDRIA, VIRGINIA 22314
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