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Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	014462/0273			Pages:	26
		Recorded:	03/31/2004
Conveyance:	CHANGE OF NAME, CONVERSION, MERGER, AND CONFIRMATORY ASSIGNMENT

Total properties: 22

1

Patent #:	6324003	Issue Dt:	11/27/2001	Application #:	09471484	Filing Dt:	12/23/1999
Title:	CALCIUM FLUORIDE (CAF2) STRESS PLATE AND METHOD OF MAKING THE SAME

2

Patent #:	6239863	Issue Dt:	05/29/2001	Application #:	09473710	Filing Dt:	12/29/1999
Title:	REMOVABLE COVER FOR PROTECTING A RETICLE, SYSTEM INCLUDING AND METHOD OF USING THE SAME

3

Patent #:	6507390	Issue Dt:	01/14/2003	Application #:	09501180	Filing Dt:	02/10/2000
Title:	METHOD AND APPARATUS FOR A RETICLE WITH PURGED PELLICLE-TO-RETICLE GAP

4

Patent #:	6387602	Issue Dt:	05/14/2002	Application #:	09504539	Filing Dt:	02/15/2000
Title:	APPARATUS AND METHOD OF CLEANING RETICLES FOR USE IN A LITHOGRAPHY TOOL

5

Patent #:	6307682	Issue Dt:	10/23/2001	Application #:	09504719	Filing Dt:	02/16/2000
Title:	Zoom illumination system for use in photolithography

6

Patent #:	6307619	Issue Dt:	10/23/2001	Application #:	09534127	Filing Dt:	03/23/2000
Title:	Scanning framing blade apparatus

7

Patent #:	6369874	Issue Dt:	04/09/2002	Application #:	09551531	Filing Dt:	04/18/2000
Title:	PHOTORESIST OUTGASSING MILTGATION SYSTEM METHOD AND APPARATUS FOR IN-VACUUM LITHOGRAPHY

8

Patent #:	6509952	Issue Dt:	01/21/2003	Application #:	09575997	Filing Dt:	05/23/2000
Title:	METHOD AND SYSTEM FOR SELECTIVE LINEWIDTH OPTIMIZATION DURING A LITHOGRAPHIC PROCESS

9

Patent #:	6556281	Issue Dt:	04/29/2003	Application #:	09575998	Filing Dt:	05/23/2000
Title:	FLEXIBLE PIEZOELECTRIC CHUCK AND METHOD OF USING THE SAME

10

Patent #:	6589354	Issue Dt:	07/08/2003	Application #:	09753665	Filing Dt:	01/04/2001
Publication #:	US20020083957	Pub Dt:	07/04/2002
Title:	METHOD AND APPARATUS FOR IN-SITU LITHOGRAPHY MASK CLEANING

11

Patent #:	6570713	Issue Dt:	05/27/2003	Application #:	09793126	Filing Dt:	02/27/2001
Publication #:	US20020118721	Pub Dt:	08/29/2002
Title:	METHOD AND APPARATUS FOR OPTIMIZING THE OUTPUT BEAM CHARACTERISTICS OF A LASER

12

Patent #:	6538720	Issue Dt:	03/25/2003	Application #:	09794133	Filing Dt:	02/28/2001
Publication #:	US20020118346	Pub Dt:	08/29/2002
Title:	LITHOGRAPHIC TOOL WITH DUAL ISOLATION SYSTEM AND METHOD FOR CONFIGURING THE SAME

13

Patent #:	6556364	Issue Dt:	04/29/2003	Application #:	09841108	Filing Dt:	04/25/2001
Publication #:	US20010033437	Pub Dt:	10/25/2001
Title:	APPARATUS, SYSTEM, AND METHOD FOR PRECISION POSITIONING AND ALIGNMENT OF A LENS IN AN OPTICAL SYSTEM

14

Patent #:	6522483	Issue Dt:	02/18/2003	Application #:	09841166	Filing Dt:	04/25/2001
Publication #:	US20020027718	Pub Dt:	03/07/2002
Title:	OPTICAL REDUCTION SYSTEM WITH ELIMINATION OF RETICLE DIFFRACTION INDUCED BIAS

15

Patent #:	6559922	Issue Dt:	05/06/2003	Application #:	09846386	Filing Dt:	05/02/2001
Publication #:	US20010038442	Pub Dt:	11/08/2001
Title:	METHOD AND APPARATUS FOR A NON-CONTACT SCAVENGING SEAL

16

Patent #:	7242464	Issue Dt:	07/10/2007	Application #:	09907902	Filing Dt:	07/19/2001
Publication #:	US20020021460	Pub Dt:	02/21/2002
Title:	METHOD FOR CHARACTERIZING OPTICAL SYSTEMS USING HOLOGRAPHIC RETICLES

17

Patent #:	6760641	Issue Dt:	07/06/2004	Application #:	09923397	Filing Dt:	08/08/2001
Publication #:	US20030060921	Pub Dt:	03/27/2003
Title:	DISCRETE TIME TRAJECTORY PLANNER FOR LITHOGRAPHY SYSTEM

18

Patent #:	NONE	Issue Dt:		Application #:	09986106	Filing Dt:	11/07/2001
Publication #:	US20020085185	Pub Dt:	07/04/2002
Title:	Method and system of varying optical imaging performance in the presence of refractive index variations

19

Patent #:	6847434	Issue Dt:	01/25/2005	Application #:	10314419	Filing Dt:	12/09/2002
Publication #:	US20030123042	Pub Dt:	07/03/2003
Title:	METHOD AND APPARATUS FOR A RETICLE WITH PURGED PELLICLE-TO-RETICLE GAP

20

Patent #:	6836380	Issue Dt:	12/28/2004	Application #:	10366614	Filing Dt:	02/14/2003
Publication #:	US20030223126	Pub Dt:	12/04/2003
Title:	OPTICAL REDUCTION SYSTEM WITH ELIMINATION OF RETICLE DIFFRACTION INDUCED BIAS

21

Patent #:	7164463	Issue Dt:	01/16/2007	Application #:	10369569	Filing Dt:	02/21/2003
Publication #:	US20030164931	Pub Dt:	09/04/2003
Title:	LITHOGRAPHIC TOOL WITH DUAL ISOLATION SYSTEM AND METHOD FOR CONFIGURING THE SAME

22

Patent #:	6760167	Issue Dt:	07/06/2004	Application #:	10403027	Filing Dt:	04/01/2003
Publication #:	US20030202260	Pub Dt:	10/30/2003
Title:	APPARATUS SYSTEM AND METHOD FOR PRECISION POSITIONING AND ALIGNMENT OF A LENS IN AN OPTICAL SYSTEM

Assignors

1

SILICON VALLEY GROUP, INC.

Exec Dt:

11/01/2001

2

Exec Dt:

10/04/2002

3

ASM LITHOGRAPHY, INC. AND ASML US, LLC

Exec Dt:

12/31/2002

4

Exec Dt:

10/09/2003

Assignees

1

8555 SOUTH RIVER PARKWAY

TEMPE, ARIZONA 85284

2

1209 ORANGE STREET

WILMINGTON, DELAWARE 19801

3

8555 SOUTH RIVER PARKWAY

TEMPE, ARIZONA 85284

4

ASML HOLDING N.V.

DE RUN 6501

VELDHOVEN, NETHERLANDS NL-5504 DR

Correspondence name and address
	STERNE, KESSLER, GOLDSTEIN & FOX PLLC
	1100 NEW YORK AVENUE, N.W.
	WASHINGTON, DC 20005

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