Patent Assignment Details
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Reel/Frame: | 014477/0032 | |
| Pages: | 2 |
| | Recorded: | 09/12/2003 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10624384
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Filing Dt:
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07/22/2003
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Publication #:
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Pub Dt:
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07/12/2007
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Title:
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Method and apparatus for deposition of low-k dielectric materials
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Assignee
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3600 GANTZ ROAD |
GROVE CITY, OHIO 43123 |
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Correspondence name and address
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WEGMAN HESSLER & VANDERBURG
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BRUCE E. PEACOCK
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6055 ROCKSIDE WOODS BLVD.
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STE. 200
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CLEVELAND, OH 44131
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