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Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	014484/0588			Pages:	27
		Recorded:	04/08/2004
Conveyance:	CERTIFICATE OF OWNERSHIP AND MERGER, CONVERSION, MERGER, AND CONFIRMATORY ASSIGNMENT

Total properties: 24

1

Patent #:	4778332	Issue Dt:	10/18/1988	Application #:	07012537	Filing Dt:	02/09/1987
Title:	WAFER FLIP APPARATUS

2

Patent #:	5285142	Issue Dt:	02/08/1994	Application #:	08015520	Filing Dt:	02/09/1993
Title:	WAFER STAGE WITH REFERENCE SURFACE

3

Patent #:	5352962	Issue Dt:	10/04/1994	Application #:	08048860	Filing Dt:	04/19/1993
Title:	BRUSHLESS POLYPHASE REDUCED FORCE VARIATION MOTOR

4

Patent #:	5684566	Issue Dt:	11/04/1997	Application #:	08449005	Filing Dt:	05/24/1995
Title:	ILLUMINATION SYSTEM AND METHOD EMPLOYING A DEFORMABLE MIRROR AND DIFFRACTIVE OPTICAL ELEMENTS

5

Patent #:	5631721	Issue Dt:	05/20/1997	Application #:	08449301	Filing Dt:	05/24/1995
Title:	HYBRID ILLUMINATION SYSTEM FOR USE IN PHOTOLITHOGRAPHY

6

Patent #:	5815310	Issue Dt:	09/29/1998	Application #:	08571081	Filing Dt:	12/12/1995
Title:	HIGH NUMERICAL APERTURE RING FIELD OPTICAL REDUCTION SYSTEM

7

Patent #:	5727685	Issue Dt:	03/17/1998	Application #:	08686085	Filing Dt:	07/24/1996
Title:	RETICLE CONTAINER WITH CORNER HOLDING

8

Patent #:	5966216	Issue Dt:	10/12/1999	Application #:	08793069	Filing Dt:	02/14/1997
Title:	ON-AXIX MASK AND WAFER ALIGNMENT SYSTEM

9

Patent #:	6259513	Issue Dt:	07/10/2001	Application #:	08799107	Filing Dt:	02/11/1997
Title:	ILLUMINATION SYSTEM WITH SPATIALLY CONTROLLABLE PARTIAL COHERENCE

10

Patent #:	5966202	Issue Dt:	10/12/1999	Application #:	08829099	Filing Dt:	03/31/1997
Title:	ADJUSTABLE SLIT

11

Patent #:	5896188	Issue Dt:	04/20/1999	Application #:	08835653	Filing Dt:	04/10/1997
Title:	REDUCTION OF PATTERN NOISE IN SCANNING LITHOGRAPHIC SYSTEM ILLUMINATORS

12

Patent #:	5767523	Issue Dt:	06/16/1998	Application #:	08838549	Filing Dt:	04/09/1997
Title:	MULTIPLE DETECTOR ALIGNMENT SYSTEM FOR PHOTOLITHOGRAPHY

13

Patent #:	5895737	Issue Dt:	04/20/1999	Application #:	09023407	Filing Dt:	02/12/1998
Title:	METHOD FOR ADJUSTING AN ILLUMINATION FIELD BASED ON SELECTED RETICLE FEATURE

14

Patent #:	6292255	Issue Dt:	09/18/2001	Application #:	09232756	Filing Dt:	01/15/1999
Title:	DOSE CORRECTION FOR ALONG SCAN LINEWIDTH VARIATION

15

Patent #:	6013401	Issue Dt:	01/11/2000	Application #:	09232758	Filing Dt:	01/15/1999
Title:	METHOD CONTROLLING ILLUMINATION FIELD TO REDUCE LINE WIDTH VARIATION

16

Patent #:	7016025	Issue Dt:	03/21/2006	Application #:	09339506	Filing Dt:	06/24/1999
Title:	METHOD AND APPARATUS FOR CHARACTERIZATION OF OPTICAL SYSTEMS

17

Patent #:	6097474	Issue Dt:	08/01/2000	Application #:	09391928	Filing Dt:	09/08/1999
Title:	DYNAMICALLY ADJUSTABLE HIGH RESOLUTION ADJUSTABLE SLIT

18

Patent #:	6444372	Issue Dt:	09/03/2002	Application #:	09426250	Filing Dt:	10/25/1999
Title:	NON ABSORBING RETICLE AND METHOD OF MAKING SAME

19

Patent #:	6628406	Issue Dt:	09/30/2003	Application #:	09553270	Filing Dt:	04/20/2000
Title:	SELF REFERENCING MARK INDEPENDENT ALIGNMENT SENSOR

20

Patent #:	6628370	Issue Dt:	09/30/2003	Application #:	09599383	Filing Dt:	06/22/2000
Title:	ILLUMINATION SYSTEM WITH SPATIALLY CONTROLLABLE PARTIAL COHERENCE COMPENSATING FOR LINE WIDTH VARIANCES IN A PHOTOLITHOGRAPHIC SYSTEM

21

Patent #:	6686101	Issue Dt:	02/03/2004	Application #:	10198332	Filing Dt:	07/17/2002
Publication #:	US20020182519	Pub Dt:	12/05/2002
Title:	NON ABSORBING RETICLE AND METHOD OF MAKING SAME

22

Patent #:	6822728	Issue Dt:	11/23/2004	Application #:	10667387	Filing Dt:	09/23/2003
Publication #:	US20040057033	Pub Dt:	03/25/2004
Title:	ILLUMINATION SYSTEM WITH SPATIALLY CONTROLLABLE PARTIAL COHERENCE COMPENSATION FOR LINE WIDTH VARIANCES IN A PHOTOLITHOGRAPHIC SYSTEM

23

Patent #:	6809827	Issue Dt:	10/26/2004	Application #:	10670028	Filing Dt:	09/25/2003
Publication #:	US20040066518	Pub Dt:	04/08/2004
Title:	SELF REFERENCING MARK INDEPENDENT ALIGNMENT SENSOR

24

Patent #:	7014963	Issue Dt:	03/21/2006	Application #:	10735658	Filing Dt:	12/16/2003
Publication #:	US20040131954	Pub Dt:	07/08/2004
Title:	NON ABSORBING RETICLE AND METHOD OF MAKING SAME

Assignors

1

SVG LITHOGRAPHY SYSTEMS, INC.

Exec Dt:

12/31/2001

2

Exec Dt:

10/04/2002

3

ASM LITHOGRAPHY, INC. AND ASML US, LLC

Exec Dt:

12/31/2002

4

Exec Dt:

10/09/2003

Assignees

1

8555 SOUTH RIVER PARKWAY

TEMPE, ARIZONA 85284

2

1209 ORANGE STREET

WILMINGTON, DELAWARE 19801

3

8555 SOUTH RIVER PARKWAY

TEMPE, ARIZONA 85284

4

ASML HOLDING N.V.

DE RUN 6501

VELDHOVEN, NETHERLANDS NL-5504 DR

Correspondence name and address
	STERNE, KESSLER, GOLDSTEIN & FOX PLLC
	1100 NEW YORK AVENUE, N.W.
	WASHINGTON, DC 20005

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