Patent Assignment Details
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| Reel/Frame: | 014548/0502 | |
| Pages: | 9 |
| | Recorded: | 09/17/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/06/2006
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Application #:
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10665099
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Filing Dt:
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09/17/2003
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Publication #:
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Pub Dt:
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03/17/2005
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Title:
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MICROFEATURE WORKPIECE PROCESSING APPARATUS AND METHODS FOR CONTROLLING DEPOSITION OF MATERIALS ON MICROFEATURE WORKPIECES INCLUDING AFTER PRECURSOR STEP REDUCING THE PRESSURE IN THE CHAMBER BY AT LEAST 90% DURING PURGING STEP
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Assignee
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| 8000 SOUTH FEDERAL WAY |
| P.O. BOX 6 |
| BOISE, IDAHO 83706-9632 |
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Correspondence name and address
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PERKINS COIE LLP
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EDWARD S. HOTCHKISS
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P.O. BOX 1247
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SEATTLE, WA 98111-1247
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