Patent Assignment Details
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| Reel/Frame: | 014587/0444 | |
| Pages: | 2 |
| | Recorded: | 10/14/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10380696
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Filing Dt:
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10/14/2003
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Publication #:
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Pub Dt:
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03/18/2004
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Title:
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Method for film formation of gate insulator, apparatus for film formation of gate insulator, and cluster tool
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Assignee
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| 18-1-304, KAMITSURUMA 8-CHOME |
| SAGAMIHARA-SHI, KANAGAWA 228-0802, JAPAN |
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Correspondence name and address
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CROWELL & MORING LLP
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HERBERT I. CANTOR
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INTELLECTUAL PROPERTY GROUP
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P.O. BOX 14300
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WASHINGTON, D.C. 20044-4300
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