Patent Assignment Details
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| Reel/Frame: | 014616/0818 | |
| Pages: | 3 |
| | Recorded: | 05/11/2004 | | |
| Conveyance: | CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10643556
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Filing Dt:
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08/18/2003
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Publication #:
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Pub Dt:
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05/13/2004
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Title:
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Process and apparatus for pulsed dc magnetron reactive sputtering of thin film coatings on large substrates using smaller sputter cathodes
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Assignee
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| P.O. BOX 808, L-293 |
| LIVERMORE, CALIFORNIA 94550 |
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Correspondence name and address
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U.S. DEPARTMENT OF ENERGY
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JANET L. REGO
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P.O. BOX 808 (MS-L-293)
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LAWRENCE LIVERMORE NATIONAL LABORATORY
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LIVERMORE, CA 94550
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