Patent Assignment Details
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| Reel/Frame: | 014665/0232 | |
| Pages: | 5 |
| | Recorded: | 11/03/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/10/2008
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Application #:
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10700020
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Filing Dt:
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11/03/2003
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Publication #:
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Pub Dt:
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06/03/2004
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Title:
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SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEM
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Assignees
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| TENJINKITA-CHO 1-1 |
| TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI |
| KAMIGYO-KU, KYOTO 602-8585, JAPAN |
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| 10-26, WAKINOHAMA-CHO 2-CHOME |
| CHUO-KU, KOBE-SHI, HYOGO 651-8585, JAPAN |
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Correspondence name and address
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OSTROLENK FABER GERB & SOFFEN, LLP
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JAMES A. FINDER
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1180 AVENUE OF THE AMERICAS
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NEW YORK, NY 10036-8403
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