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Patent #:
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Issue Dt:
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03/01/1988
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Application #:
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06628354
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Filing Dt:
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07/06/1984
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Title:
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SUBSTRATE CONTAINING FIBERS OR PREDETERMINED ORIENTATION AND PROCESS OF MAKING THE SAME
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Patent #:
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Issue Dt:
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05/13/1986
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Application #:
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06736056
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Filing Dt:
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05/20/1985
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Title:
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AQUEOUS SILICA COMPOSITIONS FOR POLISHING SILICON WAFERS
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Patent #:
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Issue Dt:
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05/22/1990
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Application #:
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06843881
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Filing Dt:
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03/25/1986
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Title:
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PAD MATERIAL FOR GRINDING, LAPPING AND POLISHING
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Patent #:
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Issue Dt:
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06/21/1988
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Application #:
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07050840
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Filing Dt:
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05/15/1987
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Title:
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CONCENTRATED LAPPING SLURRIES
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Patent #:
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Issue Dt:
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09/19/1989
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Application #:
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07242231
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Filing Dt:
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09/09/1988
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Title:
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LAPPING SLURRY COMPOSITIONS WITH IMPROVED LAP RATE
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Patent #:
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Issue Dt:
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06/27/1989
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Application #:
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07248335
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Filing Dt:
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09/20/1988
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Title:
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INVERTED CELL PAD MATERIAL FOR GRINDING, LAPPING, SHAPING AND POLISHING
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Patent #:
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Issue Dt:
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09/25/1990
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Application #:
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07387474
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Filing Dt:
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07/31/1989
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Title:
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METHOD AND COMPOSITION FOR POLISHING METAL SURFACES
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Patent #:
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Issue Dt:
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11/02/1993
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Application #:
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07829736
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Filing Dt:
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01/31/1992
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Title:
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APPARATUS FOR INTERLAYER PLANARIZATION OF SEMICONDUCTOR MATERIAL
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Patent #:
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Issue Dt:
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11/23/1993
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Application #:
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07874654
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Filing Dt:
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04/27/1992
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Title:
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COMPOSITIONS AND METHODS FOR POLISHING AND PLANARIZING SURFACES
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Patent #:
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Issue Dt:
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02/21/1995
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Application #:
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08067234
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Filing Dt:
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05/26/1993
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Title:
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COMPOSITIONS AND METHODS FOR POLISHING
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Patent #:
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Issue Dt:
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02/14/1995
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Application #:
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08095749
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Filing Dt:
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07/21/1993
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Title:
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0XIDE PARTICLES AND METHOD FOR PRODUCING THEM
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Patent #:
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Issue Dt:
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01/17/1995
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Application #:
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08116322
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Filing Dt:
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09/03/1993
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Title:
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ACTIVATED POLISHING COMPOSITIONS
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Patent #:
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Issue Dt:
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02/06/1996
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Application #:
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08224768
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Filing Dt:
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04/08/1994
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Title:
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POLISHING PADS AND METHODS FOR THEIR USE
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Patent #:
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Issue Dt:
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12/19/1995
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Application #:
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08265939
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Filing Dt:
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06/27/1994
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Title:
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COMPOSITIONS AND METHODS FOR POLISHING
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Patent #:
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Issue Dt:
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11/26/1996
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Application #:
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08274134
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Filing Dt:
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07/12/1994
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Title:
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POLYMERIC POLISHING PAD CONTAINING HOLLOW POLYMERIC MICROELEMENTS
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Patent #:
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Issue Dt:
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01/02/1996
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Application #:
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08301558
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Filing Dt:
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09/06/1994
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Title:
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ACTIVATED POLISHING COMPOSITIONS
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Patent #:
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Issue Dt:
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02/25/1997
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Application #:
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08517578
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Filing Dt:
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08/21/1995
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Title:
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POLISHING PADS AND METHODS FOR THEIR USE
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Patent #:
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Issue Dt:
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12/02/1997
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Application #:
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08541898
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Filing Dt:
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10/10/1995
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Title:
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POLISHING SLURRIES COMPRISING TWO ABRASIVE COMPONENTS AND METHOD FOR THEIR USE
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Patent #:
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Issue Dt:
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06/23/1998
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Application #:
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08608287
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Filing Dt:
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02/28/1996
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Title:
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COMPOSITIONS AND METHODS FOR POLISHING SILICA, SILICATES, AND SILICON NITRIDE
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Patent #:
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Issue Dt:
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01/19/1999
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Application #:
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08758064
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Filing Dt:
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11/27/1996
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Title:
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POLISHING SILICON WAFERS WITH IMPROVED POLISHING SLURRIES
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Patent #:
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Issue Dt:
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01/25/2000
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Application #:
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08782717
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Filing Dt:
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01/13/1997
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Title:
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METHODS FOR USING POLISHING PADS
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Patent #:
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Issue Dt:
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04/14/1998
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Application #:
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08802829
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Filing Dt:
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02/19/1997
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Title:
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COMPOSITION AND METHOD FOR POLISHING A COMPOSITE OF SILICA AND SILICON NITRIDE
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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08814514
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Filing Dt:
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03/10/1997
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Title:
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METHOD OF MAKING POLISHING PADS
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Patent #:
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Issue Dt:
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05/26/1998
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Application #:
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08819236
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Filing Dt:
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03/17/1997
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Title:
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COMPOSITION AND METHOD FOR POLISHING A COMPOSITE COMPRISING TITANIUM
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Patent #:
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Issue Dt:
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12/14/1999
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Application #:
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08859132
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Filing Dt:
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05/20/1997
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Title:
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METHOD FOR POLISHING A COMPOSITE COMPRISING AN INSULATOR, A METAL, AND TITANIUM
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Patent #:
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Issue Dt:
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06/23/1998
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Application #:
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08889338
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Filing Dt:
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07/08/1997
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Title:
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COMPOSITION AND METHOD FOR POLISHING A COMPOSITE COMPRISING TITANIUM
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Patent #:
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Issue Dt:
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08/03/1999
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Application #:
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08912144
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Filing Dt:
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08/15/1997
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Title:
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APPARATUS AND METHODS FOR RECIRCULATING CHEMICAL-MECHANICAL POLISHING OF SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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06/13/2000
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Application #:
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08915775
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Filing Dt:
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08/21/1997
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Title:
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METHOD FOR PHOTOELECTROCHEMICAL POLISHING OF SILICON WAFERS
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Patent #:
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Issue Dt:
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05/04/1999
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Application #:
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08954979
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Filing Dt:
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10/20/1997
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Title:
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METHOD FOR PLANARIZING A SEMICONDUCTOR DEVICE SURFACE WITH POLYMERIC PAD CONTAINING HOLLOW POLYMERIC MICROELEMENTS
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Patent #:
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Issue Dt:
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03/14/2000
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Application #:
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09005708
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Filing Dt:
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01/12/1998
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Title:
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POLYMERIC POLISHING PAD HAVING PHOTOLITHOGRAPHICALLY INDUCED SURFACE PATTERNS(S) AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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02/08/2000
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Application #:
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09021437
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Filing Dt:
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02/10/1998
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Title:
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POLISHING PAD AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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03/28/2000
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Application #:
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09037668
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Filing Dt:
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03/10/1998
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Title:
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COMPOSITION FOR POLISHING A COMPOSITE OF SILICA AND SILICON NITRIDE
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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09049864
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Filing Dt:
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03/27/1998
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Title:
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POLISHING SYSTEM HAVING A MULTI-PHASE POLISHING SUBSTRATE AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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02/08/2000
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Application #:
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09054948
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Filing Dt:
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04/03/1998
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Title:
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POLISHING PADS AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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10/17/2000
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Application #:
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09071566
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Filing Dt:
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05/01/1998
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Title:
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COMPOSITION AND METHOD FOR POLISHING A COMPOSITE OF SILICA AND SILICON NITRIDE
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Patent #:
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Issue Dt:
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02/01/2000
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Application #:
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09074667
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Filing Dt:
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05/08/1998
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Title:
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MOSAIC POLISHING PADS AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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06/06/2000
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Application #:
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09109688
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Filing Dt:
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07/02/1998
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Title:
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SCORED POLISHING PAD AND METHODS RELATED THERETO
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Patent #:
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Issue Dt:
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07/25/2000
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Application #:
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09131261
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Filing Dt:
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08/07/1998
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Title:
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POLISHING SLURRY COMPOSITIONS CAPABLE OF PROVIDING MULTI-MODAL PARTICLE PACKING AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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08/01/2000
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Application #:
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09159478
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Filing Dt:
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09/23/1998
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Title:
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POLYETHER-POLYESTER POLYURETHANE POLISHING PADS AND RELATED METHODS
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Patent #:
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Issue Dt:
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11/07/2000
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Application #:
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09252279
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Filing Dt:
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02/18/1999
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Title:
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CHEMICAL MECHANICAL POLISHING COMPOSITION AND METHOD OF POLISHING A SUBSTRATE
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09325304
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Filing Dt:
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06/03/1999
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Title:
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METHOD OF POLISHING SUBSTRATES COMPRISING SILICON DIOXIDE AND COMPOSITION RELATING THERETO
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Patent #:
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Issue Dt:
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08/08/2000
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Application #:
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09327795
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Filing Dt:
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06/08/1999
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Title:
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POLISHING MATERIAL AND METHOD OF POLISHING A SURFACE
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Patent #:
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Issue Dt:
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02/29/2000
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Application #:
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09363540
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Filing Dt:
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07/29/1999
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Title:
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APPARATUS AND METHODS FOR RECIRCULATING CHEMICAL-MECHANICAL POLISHING OF SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09366581
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Filing Dt:
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08/04/1999
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Title:
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POLYMERIC POLISHING PAD HAVING CONTINUOUSLY REGENERATED WORK SURFACE
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Patent #:
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Issue Dt:
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01/09/2001
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Application #:
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09375962
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Filing Dt:
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08/17/1999
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Title:
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MOLDED POLISHING PAD HAVING INTEGRAL WINDOW
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09384607
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Filing Dt:
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08/27/1999
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Title:
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POLISHING SYSTEM HAVING A MULTI-PHASE POLISHING SUBSTRATE AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09406962
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Filing Dt:
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09/28/1999
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Title:
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POLYMERIC POLISHING PAD HAVING IMPROVED SURFACE LAYER AND METHOD OF MAKING SAME
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09413083
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Filing Dt:
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10/06/1999
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Title:
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CMP POLISHING SLURRY DEWATERING AND RECONSTITUTION
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Patent #:
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Issue Dt:
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02/17/2004
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Application #:
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09420682
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Filing Dt:
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10/19/1999
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Title:
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METHODS TO CONTROL FILM REMOVAL RATES FOR IMPROVED POLISHING IN METAL CMP
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Patent #:
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Issue Dt:
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04/17/2001
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Application #:
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09465566
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Filing Dt:
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12/17/1999
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Title:
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POLISHING PADS AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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03/12/2002
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Application #:
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09488414
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Filing Dt:
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01/21/2000
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Title:
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Polishing pads and methods relating thereto
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09496327
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Filing Dt:
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02/02/2000
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Title:
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Polymeric polishing pad having photolithographically induced surface pattern(s) and methods relating thereto
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09497416
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Filing Dt:
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02/04/2000
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Title:
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Polishing pad and method of use thereof
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Patent #:
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Issue Dt:
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06/12/2001
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Application #:
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09498267
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Filing Dt:
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02/03/2000
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Title:
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Apparatus and methods for chemical-mechanical polishing of semiconductor wafers
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Patent #:
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Issue Dt:
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09/11/2001
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Application #:
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09514717
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Filing Dt:
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02/28/2000
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Title:
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Polishing pads and methods relating thereto
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Patent #:
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Issue Dt:
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01/08/2002
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Application #:
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09521042
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Filing Dt:
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03/08/2000
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Title:
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Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like
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Patent #:
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Issue Dt:
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09/04/2001
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Application #:
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09536189
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Filing Dt:
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03/24/2000
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Title:
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METHOD OF FABRICATING A Porous polymeric material by electrophoretic deposition
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Patent #:
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Issue Dt:
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11/20/2001
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Application #:
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09564102
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Filing Dt:
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05/03/2000
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Title:
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Apparatus for photoelectrochemical polishing of silicon wafers
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09567905
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Filing Dt:
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05/10/2000
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Title:
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Method of polishing
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09571920
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Filing Dt:
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05/16/2000
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Title:
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Polishing pads and methods relating thereto
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Patent #:
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Issue Dt:
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07/30/2002
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Application #:
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09572145
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Filing Dt:
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05/17/2000
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Publication #:
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Pub Dt:
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03/28/2002
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Title:
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SCORED POLISHING PAD AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09575787
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Filing Dt:
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05/22/2000
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Title:
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POLISHING SLURRY COMPOSITIONS CAPABLE OF PROVIDING MULTI-MODAL PARTICLE PACKING
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Patent #:
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Issue Dt:
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04/17/2001
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Application #:
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09578945
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Filing Dt:
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05/25/2000
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Title:
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Composition and method for polishing a composite of silica and silicon nitride
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Patent #:
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Issue Dt:
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07/16/2002
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Application #:
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09587887
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Filing Dt:
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06/06/2000
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Title:
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METHOD OF POLISHING USING A POLISHING PAD
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09598377
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Filing Dt:
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06/21/2000
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Title:
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CHEMICAL MECHANICAL POLISHING SLURRIES FOR METAL
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09599116
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Filing Dt:
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06/22/2000
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Title:
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POLISHING PADS OF FLOCKED HOLLOW FIBERS AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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06/11/2002
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Application #:
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09610820
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Filing Dt:
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07/06/2000
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Title:
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METHOD FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09620150
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Filing Dt:
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07/20/2000
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Title:
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Small particle size chemical mechanical polishing composition
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Patent #:
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Issue Dt:
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05/18/2004
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Application #:
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09631783
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Filing Dt:
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08/03/2000
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Title:
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GROOVED POLISHING PADS FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09631784
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Filing Dt:
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08/03/2000
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Title:
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POLISHING PADS FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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09/03/2002
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Application #:
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09634013
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Filing Dt:
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08/08/2000
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Title:
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COMPOSITIONS FOR INSULATOR AND METAL CMP AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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04/03/2001
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Application #:
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09634788
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Filing Dt:
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08/09/2000
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Title:
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Apparatus and methods for chemical-mechanical polishing of semiconductor wafers
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Patent #:
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Issue Dt:
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10/15/2002
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Application #:
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09635877
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Filing Dt:
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08/10/2000
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Title:
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STACKED POLISHING PAD HAVING SEALED EDGE
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Patent #:
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Issue Dt:
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08/19/2003
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Application #:
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09643578
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Filing Dt:
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08/22/2000
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Title:
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COMPOSITIONS FOR INSULATOR AND METAL CMP AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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03/02/2004
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Application #:
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09660798
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Filing Dt:
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09/13/2000
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Title:
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ELIMINATION OF TRAPPED AIR UNDER POLISHING PADS
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Patent #:
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Issue Dt:
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12/03/2002
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Application #:
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09665840
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Filing Dt:
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09/20/2000
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Title:
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METHOD RELATING TO A POLISHING SYSTEM HAVING A MULTI-PHASE POLISHING LAYER
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Patent #:
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Issue Dt:
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06/15/2004
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Application #:
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09665841
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Filing Dt:
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09/20/2000
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Title:
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HYDROLYTICALLY STABLE GROOVED POLISHING PADS FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09666418
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Filing Dt:
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09/20/2000
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Title:
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MOLDING A POLISHING PAD HAVING INTEGRAL WINDOW
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09671774
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Filing Dt:
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09/28/2000
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Title:
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Polishing pad
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Patent #:
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Issue Dt:
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11/05/2002
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Application #:
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09693211
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Filing Dt:
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10/20/2000
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Title:
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CONTROL OF REMOVAL RATES IN CMP
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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09693401
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Filing Dt:
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10/20/2000
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Title:
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POLISHING PAD HAVING AN ADVANTAGEOUS MICRO-TEXTURE AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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01/27/2004
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Application #:
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09711008
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Filing Dt:
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11/10/2000
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Title:
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POLISHING PADS AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09717470
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Filing Dt:
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11/21/2000
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Title:
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Polishing pads and methods relating thereto
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09734089
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Filing Dt:
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12/11/2000
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Publication #:
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Pub Dt:
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06/13/2002
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Title:
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METHOD OF MANUFACTURING A POLYMER OR POLYMER/COMPOSITE POLISHING PAD
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Patent #:
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Issue Dt:
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04/30/2002
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Application #:
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09734095
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Filing Dt:
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12/11/2000
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Title:
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POLISHING COMPOSITIONS FOR SEMICONDUCTOR SUBSTRATES
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Patent #:
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Issue Dt:
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09/30/2003
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Application #:
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09742953
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Filing Dt:
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12/21/2000
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Publication #:
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Pub Dt:
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01/10/2002
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Title:
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SELF-LEVELING PADS AND METHODS RELATING THERETO
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09749082
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Filing Dt:
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12/27/2000
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Publication #:
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Pub Dt:
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10/18/2001
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Title:
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System for ordering and manufacturing a tangible device
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Patent #:
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Issue Dt:
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07/16/2002
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Application #:
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09754424
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Filing Dt:
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01/04/2001
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Publication #:
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Pub Dt:
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12/20/2001
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Title:
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METHODS FOR BREAK-IN AND CONDITIONING A FIXED ABRASIVE POLISHING PAD
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Patent #:
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Issue Dt:
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08/05/2003
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Application #:
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09764817
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Filing Dt:
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01/18/2001
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Publication #:
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Pub Dt:
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11/08/2001
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Title:
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DISSOLUTION OF METAL PARTICLES PRODUCED BY POLISHING
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09769058
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Filing Dt:
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01/25/2001
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Publication #:
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Pub Dt:
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03/07/2002
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Title:
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POLISHING COMPOSITION AND MANUFACTURING AND POLISHING METHODS
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Patent #:
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Issue Dt:
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01/20/2004
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Application #:
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09775972
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Filing Dt:
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02/02/2001
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Publication #:
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Pub Dt:
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05/16/2002
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Title:
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POLISHING PAD HAVING AN ADVANTAGEOUS MICRO-TEXTURE AND METHODS RELATING THERETO
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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09776079
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Filing Dt:
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02/02/2001
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Publication #:
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Pub Dt:
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11/22/2001
| | | | |
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Title:
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POLISHING COMPOSITION
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Patent #:
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Issue Dt:
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02/11/2003
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Application #:
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09792813
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Filing Dt:
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02/24/2001
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Publication #:
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Pub Dt:
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10/18/2001
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Title:
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POLISHING PAD WITH A TRANSPARENT PORTION
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Patent #:
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Issue Dt:
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03/11/2003
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Application #:
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09803233
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Filing Dt:
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03/09/2001
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Publication #:
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Pub Dt:
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10/10/2002
| | | | |
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Title:
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METHOD AND COMPOSITION FOR POLISHING BY CMP
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Patent #:
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Issue Dt:
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03/01/2005
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Application #:
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09805328
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Filing Dt:
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03/13/2001
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Publication #:
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Pub Dt:
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12/20/2001
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Title:
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WINDOW PORTION WITH AN ADJUSTED RATE OF WEAR
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|
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Patent #:
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Issue Dt:
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12/04/2001
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Application #:
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09815090
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Filing Dt:
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03/22/2001
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Publication #:
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Pub Dt:
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09/27/2001
| | | | |
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Title:
|
Polishing pads and methods relating thereto
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|
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09819115
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Filing Dt:
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03/28/2001
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Publication #:
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Pub Dt:
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11/15/2001
| | | | |
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Title:
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DISK FOR CONDITIONING POLISHING PADS
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|
|
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Patent #:
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Issue Dt:
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05/27/2003
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Application #:
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09826525
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Filing Dt:
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04/05/2001
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Publication #:
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Pub Dt:
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11/21/2002
| | | | |
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Title:
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CMP POLISHING COMPOSITION FOR SEMICONDUCTOR DEVICES CONTAINING ORGANIC POLYMER PARTICLES
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|
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09833309
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Filing Dt:
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04/12/2001
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Publication #:
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Pub Dt:
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11/01/2001
| | | | |
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Title:
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METHODS FOR CHEMICAL-MECHANICAL POLISHING OF SEMICONDUCTOR WAFERS
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|
|
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Patent #:
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Issue Dt:
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06/03/2003
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Application #:
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09836915
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Filing Dt:
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04/18/2001
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Publication #:
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Pub Dt:
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02/21/2002
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Title:
|
DEWATERED CMP POLISHING COMPOSTIONS AND METHODS FOR USING SAME
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|
