Patent Assignment Details
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| Reel/Frame: | 014726/0142 | |
| Pages: | 3 |
| | Recorded: | 11/19/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/24/2005
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Application #:
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10716965
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Filing Dt:
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11/19/2003
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Publication #:
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Pub Dt:
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05/27/2004
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignee
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| 1006, OAZA KADOMA |
| KADOMA-SHI, OSAKA, JAPAN 571-8501 |
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Correspondence name and address
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JEFFREY J. SOPKO
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1801 EAST 9TH STREET, SUITE 1200
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CLEVELAND, OH 44114-3108
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