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Reel/Frame:014734/0588   Pages: 6
Recorded: 06/16/2004
Conveyance: MERGER (SEE DOCUMENT FOR DETAILS).
Total properties: 35
1
Patent #:
4693569
Issue Dt:
09/15/1987
Application #:
06308647
Filing Dt:
10/05/1981
Title:
METHOD AND APPARATUS FOR OPTICAL SYSTEM ADJUSTMENTS
2
Patent #:
4530635
Issue Dt:
07/23/1985
Application #:
06504718
Filing Dt:
06/15/1983
Title:
WAFER TRANSFERRING CHUCK ASSEMBLY
3
Patent #:
4606643
Issue Dt:
08/19/1986
Application #:
06505592
Filing Dt:
06/20/1983
Title:
FINE ALIGNMENT SYSTEM
4
Patent #:
4580104
Issue Dt:
04/01/1986
Application #:
06621839
Filing Dt:
06/18/1984
Title:
HIGH VOLTAGE OPERATIONAL AMPLIFIER
5
Patent #:
4711535
Issue Dt:
12/08/1987
Application #:
06732764
Filing Dt:
05/10/1985
Title:
RING FIELD PROJECTION SYSTEM
6
Patent #:
4586787
Issue Dt:
05/06/1986
Application #:
06780786
Filing Dt:
09/27/1985
Title:
LENS ASSEMBLY
7
Patent #:
4668366
Issue Dt:
05/26/1987
Application #:
06790673
Filing Dt:
10/23/1985
Title:
OPTICAL FIGURING BY PLASMA ASSISTED CHEMICAL TRANSPORT AND ETCHING APPARATUS THEREFOR
8
Patent #:
4734829
Issue Dt:
03/29/1988
Application #:
06796339
Filing Dt:
11/12/1985
Title:
SHORT ARC LAMP IMAGE TRANSFORMER
9
Patent #:
4907035
Issue Dt:
03/06/1990
Application #:
06842145
Filing Dt:
03/21/1986
Title:
UNIVERSAL EDGED-BASED WAFER ALIGNMENT APPARATUS
10
Patent #:
4681408
Issue Dt:
07/21/1987
Application #:
06856881
Filing Dt:
04/28/1986
Title:
ADJUSTABLE MOUNT FOR LARGE MIRRORS
11
Patent #:
4697087
Issue Dt:
09/29/1987
Application #:
06868506
Filing Dt:
07/31/1986
Title:
REVERSE DARK FIELD ALIGNMENT SYSTEM FOR SCANNING LITHOGRAPHIC ALIGNER
12
Patent #:
4726671
Issue Dt:
02/23/1988
Application #:
06876068
Filing Dt:
06/19/1986
Title:
HIGH RESONANCE ADJUSTABLE MIRROR MOUNT
13
Patent #:
4719705
Issue Dt:
01/19/1988
Application #:
06877817
Filing Dt:
06/24/1986
Title:
RETICLE TRANSPORTER
14
Patent #:
4760429
Issue Dt:
07/26/1988
Application #:
06927202
Filing Dt:
11/05/1986
Title:
HIGH SPEED RETICLE CHANGE SYSTEM
15
Patent #:
4846626
Issue Dt:
07/11/1989
Application #:
07012538
Filing Dt:
02/09/1987
Title:
WAFER HANDLING SYSTEM
16
Patent #:
4952858
Issue Dt:
08/28/1990
Application #:
07198545
Filing Dt:
05/18/1988
Title:
MICROLITHOGRAPHIC APPARATUS
17
Patent #:
4953960
Issue Dt:
09/04/1990
Application #:
07223968
Filing Dt:
07/15/1988
Title:
OPTICAL REDUCTION SYSTEM
18
Patent #:
4953388
Issue Dt:
09/04/1990
Application #:
07301088
Filing Dt:
01/25/1989
Title:
AIR GAUGE SENSOR
19
Patent #:
4973217
Issue Dt:
11/27/1990
Application #:
07351741
Filing Dt:
04/17/1989
Title:
WAFER HANDLING SYSTEM
20
Patent #:
5085558
Issue Dt:
02/04/1992
Application #:
07577209
Filing Dt:
09/04/1990
Title:
WAFER HANDLING SYSTEM
21
Patent #:
5193972
Issue Dt:
03/16/1993
Application #:
07790427
Filing Dt:
11/12/1991
Title:
WAFER HANDLING SYSTEM
22
Patent #:
5212593
Issue Dt:
05/18/1993
Application #:
07831818
Filing Dt:
02/06/1992
Title:
BROAD BAND OPTICAL REDUCTION SYSTEM USING MATCHED MULTIPLE REFRACTIVE ELEMENT MATERIALS
23
Patent #:
5477057
Issue Dt:
12/19/1995
Application #:
08292096
Filing Dt:
08/17/1994
Title:
OFF AXIS ALIGNMENT SYSTEM FOR SCANNING PHOTOLITHOGRAPHY
24
Patent #:
5724122
Issue Dt:
03/03/1998
Application #:
08448994
Filing Dt:
05/24/1995
Title:
ILLUMINATION SYSTEM HAVING SPATIALLY SEPARATE VERTICAL AND HORIZONTAL IMAGE PLANES FOR USE IN PHOTOLITHOGRAPHY
25
Patent #:
5920396
Issue Dt:
07/06/1999
Application #:
08730787
Filing Dt:
10/16/1996
Title:
LINE WIDTH INSENSITIVE WAFER TARGET DETECTION
26
Patent #:
5757160
Issue Dt:
05/26/1998
Application #:
08785764
Filing Dt:
12/23/1996
Title:
MOVING INTERFEROMETER WAFER STAGE
27
Patent #:
5818575
Issue Dt:
10/06/1998
Application #:
08835845
Filing Dt:
04/30/1997
Title:
LAMP STABLITY DIAGNOSTIC SYSTEM
28
Patent #:
5973764
Issue Dt:
10/26/1999
Application #:
08878633
Filing Dt:
06/19/1997
Title:
VACUUM ASSISTED DEBRIS REMOVAL SYSTEM
29
Patent #:
6195201
Issue Dt:
02/27/2001
Application #:
09238976
Filing Dt:
01/27/1999
Title:
REFLECTIVE FLY'S EYE CONDENSER FOR EUV LITHOGRAPHY
30
Patent #:
5966215
Issue Dt:
10/12/1999
Application #:
09290217
Filing Dt:
04/13/1999
Title:
LINE WIDTH INSENTIVE WAFER TARGET DETECTION IN TWO DIRECTIONS
31
Patent #:
6360012
Issue Dt:
03/19/2002
Application #:
09344664
Filing Dt:
06/25/1999
Title:
IN SITU PROJECTION OPTIC METROLOGY METHOD AND APPARATUS
32
Patent #:
6469793
Issue Dt:
10/22/2002
Application #:
09371337
Filing Dt:
08/10/1999
Title:
MULTI-CHANNEL GRATING INTERFERENCE ALIGNMENT SENSOR
33
Patent #:
6445439
Issue Dt:
09/03/2002
Application #:
09473259
Filing Dt:
12/27/1999
Title:
EUV RETICLE THERMAL MANAGEMENT
34
Patent #:
6486940
Issue Dt:
11/26/2002
Application #:
09620886
Filing Dt:
07/21/2000
Title:
HIGH NUMERICAL APERTURE CATADIOPTRIC LENS
35
Patent #:
6573975
Issue Dt:
06/03/2003
Application #:
09826214
Filing Dt:
04/04/2001
Publication #:
US20020145719
Pub Dt:
10/10/2002
Title:
DUV SCANNER LINEWIDTH CONTROL BY MASK ERROR FACTOR COMPENSATION
Assignor
1
SVG LITHOGRAPHY SYSTEMS, INC.
Exec Dt:
12/31/2001
Assignee
1
ASML US, INC.
8555 SOUTH RIVER PARKWAY
TEMPE, ARIZONA 85284
Correspondence name and address
STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
1100 NEW YORK AVE., NW
WASHINGTON, DC 20005

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