Patent Assignment Details
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| Reel/Frame: | 014778/0952 | |
| Pages: | 3 |
| | Recorded: | 08/16/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/05/2004
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Application #:
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10468362
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Filing Dt:
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08/19/2003
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Publication #:
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Pub Dt:
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04/22/2004
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Title:
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SYSTEM AND METHOD FOR UTILIZATION OF WASTE HEAT OF SEMICONDUCTOR EQUIPMENT AND HEAT EXCHANGER USED FOR UTILIZATION OF WASTE HEAT OF SEMICONDUCTOR EQUIPMENT
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Assignees
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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| 25-1, NISHI-SHINJUKU 1-CHOME |
| SHINJUKU-KU, TOKYO 163-0606, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW, GARRETT &
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DUNNER, L.L.P.
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MR. ERNEST F. CHAPMAN
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1300 I STREET, N.W.
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WASHINGTON, D.C. 20005-3315
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