Patent Assignment Details
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| Reel/Frame: | 014815/0933 | |
| Pages: | 9 |
| | Recorded: | 11/24/2003 | | |
| Conveyance: | CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09275360
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Filing Dt:
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03/23/1999
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Title:
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PLASMA DEPOSITION OF SPIN CHUCKS TO REDUCE CONTAMINATION OF SILICON WAFERS
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Assignee
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| DE RUN 1110 |
| 5503 LA VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP
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TOM VAN ZANDT
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12400 WILSHIRE BOULEVARD, 7TH FLOOR
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LOS ANGELES, CA 90025
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