Total properties:
69
|
|
Patent #:
|
|
Issue Dt:
|
06/13/1989
|
Application #:
|
07064151
|
Filing Dt:
|
06/18/1987
|
Title:
|
DUAL VOICE COIL SHUTTER
|
|
|
Patent #:
|
|
Issue Dt:
|
11/03/1992
|
Application #:
|
07728343
|
Filing Dt:
|
07/11/1991
|
Title:
|
OPTICAL PROJECTION SYSTEM INCLUDING A REFRACTIVE LENS ASSEMBLY HAVING A GAP BETWEEN CONSTITUENT LENSES
|
|
|
Patent #:
|
|
Issue Dt:
|
03/30/1993
|
Application #:
|
07802414
|
Filing Dt:
|
12/04/1991
|
Title:
|
OPTICAL COMPONENT COUPLING AND COMPOSITION THEREFOR
|
|
|
Patent #:
|
|
Issue Dt:
|
05/31/1994
|
Application #:
|
07993773
|
Filing Dt:
|
12/18/1992
|
Title:
|
THICKNESS COMPENSATION ACTUATOR SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
04/25/1995
|
Application #:
|
08118303
|
Filing Dt:
|
09/09/1993
|
Title:
|
REFLECTIVE PROJECTION SYSTEM COMPRISING FOUR SPHERICAL MIRRORS
|
|
|
Patent #:
|
|
Issue Dt:
|
11/10/1998
|
Application #:
|
08212239
|
Filing Dt:
|
03/14/1994
|
Title:
|
METHOD AND APPARATUS FOR TRANSFER OF A RETICLE PATTERN ONTO A SUBSTRATE BY SCANNING
|
|
|
Patent #:
|
|
Issue Dt:
|
09/17/1996
|
Application #:
|
08331059
|
Filing Dt:
|
10/28/1994
|
Title:
|
BEAMSPLITTER IN SINGLE FOLD OPTICAL SYSTEM AND OPTICAL VARIABLE MAGNIFICATION METHOD AND SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/17/1996
|
Application #:
|
08389035
|
Filing Dt:
|
02/15/1995
|
Title:
|
ARBITRARILY WIDE LENS ARRAY WITH AN IMAGE FIELD TO SPAN THE WIDTH OF A SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
04/15/1997
|
Application #:
|
08558613
|
Filing Dt:
|
11/14/1995
|
Title:
|
PATTERN RECOGNITION ALIGNMENT SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/22/1998
|
Application #:
|
08756723
|
Filing Dt:
|
11/26/1996
|
Title:
|
LOW-LOSS LIGHT REDIRECTION APPARATUS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/30/1999
|
Application #:
|
08791775
|
Filing Dt:
|
01/29/1997
|
Title:
|
METHOD FOR FORMING A SILICIDE REGION ON A SILICON BODY
|
|
|
Patent #:
|
|
Issue Dt:
|
06/01/1999
|
Application #:
|
08792107
|
Filing Dt:
|
01/31/1997
|
Title:
|
FABRICATION METHOD FOR REDUCED-DIMENSION FET DEVICES
|
|
|
Patent #:
|
|
Issue Dt:
|
10/13/1998
|
Application #:
|
08806663
|
Filing Dt:
|
02/26/1997
|
Title:
|
PIN MIRROR AND INTERFEROMETERS USING THE PIN MIRROR
|
|
|
Patent #:
|
|
Issue Dt:
|
03/23/1999
|
Application #:
|
08848548
|
Filing Dt:
|
04/28/1997
|
Title:
|
MAGNETICALLY-POSITIONED X-Y STAGE HAVING SIX-DEGREES OF FREEDOM
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/1999
|
Application #:
|
08867837
|
Filing Dt:
|
06/03/1997
|
Title:
|
METHOD OF MAKING A SIDE ALIGNMENT MARK
|
|
|
Patent #:
|
|
Issue Dt:
|
07/18/2000
|
Application #:
|
08946457
|
Filing Dt:
|
10/07/1997
|
Title:
|
SIX AXIS ACTIVE VIBRATION ISOLATION AND PAYLOAD REACTION FORCE COMPENSATION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
02/29/2000
|
Application #:
|
09047422
|
Filing Dt:
|
03/25/1998
|
Title:
|
AIR-GAUGE NOZZLE PROBE STRUCTURE FOR MICROLITHOGRAPHIC IMAGE FOCUSING
|
|
|
Patent #:
|
|
Issue Dt:
|
12/07/1999
|
Application #:
|
09073057
|
Filing Dt:
|
05/05/1998
|
Title:
|
MICROCHAMBER
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/1999
|
Application #:
|
09141842
|
Filing Dt:
|
08/27/1998
|
Title:
|
GAS IMMERSION LASER ANNEALING METHOD SUITABLE FOR USE IN THE FABRICATION OF REDUCED-DIMENSION INTEGRATED CIRCUITS
|
|
|
Patent #:
|
|
Issue Dt:
|
10/02/2001
|
Application #:
|
09158265
|
Filing Dt:
|
09/21/1998
|
Title:
|
METHOD FOR FORMING SILICIDE REGIONS ON AN INTEGRATED DEVICE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/14/2002
|
Application #:
|
09158346
|
Filing Dt:
|
09/21/1998
|
Publication #:
|
|
Pub Dt:
|
08/09/2001
| | | | |
Title:
|
METHOD FOR FORMING A SILICIDE REGION ON A SILICON BODY
|
|
|
Patent #:
|
|
Issue Dt:
|
06/06/2000
|
Application #:
|
09273814
|
Filing Dt:
|
03/22/1999
|
Title:
|
MAGNETICALLY POSITIONED X-Y STAGE HAVING SIX DEGREES OF FREEDOM
|
|
|
Patent #:
|
|
Issue Dt:
|
12/04/2001
|
Application #:
|
09286492
|
Filing Dt:
|
04/05/1999
|
Publication #:
|
|
Pub Dt:
|
11/08/2001
| | | | |
Title:
|
METHODS FOR DETERMINING WAVELENGTH AND PULSE LENGTH OF RADIANT ENERGY USED FOR ANNEALING
|
|
|
Patent #:
|
|
Issue Dt:
|
10/16/2001
|
Application #:
|
09311935
|
Filing Dt:
|
05/14/1999
|
Title:
|
RADIANT ENERGY MONITORING APPARATUSES INCLUDING A CALIBRATION OPERATION AND RELATED METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
01/14/2003
|
Application #:
|
09313104
|
Filing Dt:
|
05/17/1999
|
Title:
|
FIBER-OPTIC INTERFEROMETER EMPLOYING LOW-COHERENCE-LENGTH LIGHT FOR PRECISELY MEASURING ABSOLUTE DISTANCE AND TILT
|
|
|
Patent #:
|
|
Issue Dt:
|
03/18/2003
|
Application #:
|
09394365
|
Filing Dt:
|
09/10/1999
|
Title:
|
SIDE ALIGNMENT MARK
|
|
|
Patent #:
|
|
Issue Dt:
|
10/09/2001
|
Application #:
|
09505264
|
Filing Dt:
|
02/16/2000
|
Title:
|
Methods for annealing an integrated device using a radiant energy absorber layer
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/2003
|
Application #:
|
09505268
|
Filing Dt:
|
02/16/2000
|
Title:
|
APPARATUS FOR AND METHOD OF REDUCING OR ELIMINATING INTERFERENCE EFFECTS IN A LIGHT TUNNEL ILLUMINATOR
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/2003
|
Application #:
|
09505595
|
Filing Dt:
|
02/16/2000
|
Title:
|
RADIATION SHIELD DEVICE AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
04/02/2002
|
Application #:
|
09505605
|
Filing Dt:
|
02/16/2000
|
Title:
|
LASER THERMAL PROCESSING APPARATUS AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
12/30/2003
|
Application #:
|
09536867
|
Filing Dt:
|
03/27/2000
|
Title:
|
METHOD OF AND APPARATUS FOR DEFINING DISK TRACKS IN MAGNETIC RECORDING MEDIA
|
|
|
Patent #:
|
|
Issue Dt:
|
03/11/2003
|
Application #:
|
09536869
|
Filing Dt:
|
03/27/2000
|
Title:
|
AT LEAST ONE LINE SOURCE OF INCLUDING A PLURALITY OF LASER DIODES TO PROVIDE RADIANT ENERGY TO EXPOSE A SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
11/30/2004
|
Application #:
|
09536927
|
Filing Dt:
|
03/27/2000
|
Title:
|
METHODS FOR ANNEALING A SUBSTRATE AND ARTICLE PRODUCED BY SUCH METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
04/30/2002
|
Application #:
|
09543609
|
Filing Dt:
|
04/05/2000
|
Title:
|
SCANNING MICROLITHOGRAPHIC APPARATUS AND METHOD FOR PROJECTING A LARGE FIELD-OF-VIEW IMAGE ON A SUBSTRATE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/27/2003
|
Application #:
|
09546114
|
Filing Dt:
|
04/10/2000
|
Title:
|
ILLUMINATION FLUENCE REGULATION SYSTEM AND METHOD FOR USE IN THERMAL PROCESSING EMPLOYED IN THE FABRICATION OF REDUCED-DIMENSION INTEGRATED CIRCUITS
|
|
|
Patent #:
|
|
Issue Dt:
|
05/14/2002
|
Application #:
|
09547834
|
Filing Dt:
|
04/12/2000
|
Title:
|
STRUCTURE AND METHOD FOR AN OPTICAL BLOCK IN SHALLOW TRENCH ISOLATION FOR IMPROVED LASER ANNEAL CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
08/14/2001
|
Application #:
|
09547836
|
Filing Dt:
|
04/12/2000
|
Title:
|
Method of forming a silicide region in a si substrate and a device having same
|
|
|
Patent #:
|
|
Issue Dt:
|
04/30/2002
|
Application #:
|
09548326
|
Filing Dt:
|
04/12/2000
|
Title:
|
HIGH-SPEED SEMICONDUCTOR TRANSISTOR AND SELECTIVE ABSORPTION PROCESS FORMING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
08/27/2002
|
Application #:
|
09588281
|
Filing Dt:
|
06/05/2000
|
Title:
|
MAGNETICALLY POSITIONED X-Y STAGE HAVING SIX DEGREES OF FREEDOM
|
|
|
Patent #:
|
|
Issue Dt:
|
10/16/2001
|
Application #:
|
09592184
|
Filing Dt:
|
06/12/2000
|
Title:
|
Thermally induced reflectivity switch for laser thermal processing
|
|
|
Patent #:
|
|
Issue Dt:
|
02/12/2002
|
Application #:
|
09595169
|
Filing Dt:
|
06/15/2000
|
Title:
|
Acousto-optical light tunnel apparatus and method
|
|
|
Patent #:
|
|
Issue Dt:
|
11/27/2001
|
Application #:
|
09613012
|
Filing Dt:
|
07/10/2000
|
Title:
|
Folded light tunnel apparatus and method
|
|
|
Patent #:
|
|
Issue Dt:
|
11/12/2002
|
Application #:
|
09659094
|
Filing Dt:
|
09/11/2000
|
Title:
|
THERMALLY INDUCED PHASE SWITCH FOR LASER THERMAL PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
10/21/2003
|
Application #:
|
09659102
|
Filing Dt:
|
09/11/2000
|
Title:
|
METHOD FOR ANNEALING USING PARTIAL ABSORBER LAYER EXPOSED TO RADIANT ENERGY AND ARTICLE MADE WITH PARTIAL ABSORBER LAYER
|
|
|
Patent #:
|
|
Issue Dt:
|
04/02/2002
|
Application #:
|
09698670
|
Filing Dt:
|
10/27/2000
|
Title:
|
LASER THERMAL PROCESS FOR FABRICATING FIELD-EFFECT TRANSISTORS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/21/2004
|
Application #:
|
09816800
|
Filing Dt:
|
03/23/2001
|
Publication #:
|
|
Pub Dt:
|
11/21/2002
| | | | |
Title:
|
COMPUTER ARCHITECTURE FOR AND METHOD OF HIGH-RESOLUTION IMAGING USING A LOW-RESOLUTION IMAGE TRANSDUCER
|
|
|
Patent #:
|
|
Issue Dt:
|
06/22/2004
|
Application #:
|
09854226
|
Filing Dt:
|
05/10/2001
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
Title:
|
LITHOGRAPHY SYSTEM AND METHOD FOR DEVICE MANUFACTURE
|
|
|
Patent #:
|
|
Issue Dt:
|
05/24/2005
|
Application #:
|
09855485
|
Filing Dt:
|
05/14/2001
|
Title:
|
MACHINE-INDEPENDENT ALIGNMENT SYSTEM AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
02/25/2003
|
Application #:
|
09855486
|
Filing Dt:
|
05/14/2001
|
Publication #:
|
|
Pub Dt:
|
11/14/2002
| | | | |
Title:
|
BACKSIDE ALIGNMENT SYSTEM AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
07/16/2002
|
Application #:
|
09896160
|
Filing Dt:
|
06/28/2001
|
Title:
|
METHOD OF FORMING A SILICIDE REGION IN A SI SUBSTRATE AND A DEVICE HAVING SAME
|
|
|
Patent #:
|
|
Issue Dt:
|
09/09/2003
|
Application #:
|
09923734
|
Filing Dt:
|
08/06/2001
|
Title:
|
IMAGING STABILIZATION APPARATUS AND METHOD FOR HIGH-PERFORMANCE OPTICAL SYSTEMS
|
|
|
Patent #:
|
|
Issue Dt:
|
03/22/2005
|
Application #:
|
09923755
|
Filing Dt:
|
08/06/2001
|
Title:
|
METHOD AND APPARATUS FOR MASKING A WORKPIECE WITH INK
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/2003
|
Application #:
|
09933583
|
Filing Dt:
|
08/20/2001
|
Title:
|
MOTION COMPENSATION SYSTEM AND METHOD FOR LITHOGRAPHY
|
|
|
Patent #:
|
|
Issue Dt:
|
05/07/2002
|
Application #:
|
09933795
|
Filing Dt:
|
08/20/2001
|
Publication #:
|
|
Pub Dt:
|
02/14/2002
| | | | |
Title:
|
METHOD OF FORMING THERMALLY INDUCED REFLECTIVITY SWITCH FOR LASER THERMAL PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
12/17/2002
|
Application #:
|
09940102
|
Filing Dt:
|
08/27/2001
|
Publication #:
|
|
Pub Dt:
|
02/21/2002
| | | | |
Title:
|
THERMALLY INDUCED REFLECTIVITY SWITCH FOR LASER THERMAL PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2004
|
Application #:
|
09941817
|
Filing Dt:
|
08/29/2001
|
Publication #:
|
|
Pub Dt:
|
03/06/2003
| | | | |
Title:
|
METHOD FOR SEMICONDUCTOR GATE DOPING
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2004
|
Application #:
|
09973790
|
Filing Dt:
|
10/09/2001
|
Title:
|
METHOD AND APPARATUS FOR MECHANICALLY MASKING A WORKPIECE
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2004
|
Application #:
|
10023144
|
Filing Dt:
|
12/17/2001
|
Title:
|
MAGNETIC LEVITATION STAGE APPARATUS AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
05/04/2004
|
Application #:
|
10035764
|
Filing Dt:
|
10/22/2001
|
Title:
|
SYSTEM AND METHOD FOR REDUCING COLINEARITY EFFECTS IN MANUFACTURING MICRODEVICES
|
|
|
Patent #:
|
|
Issue Dt:
|
10/21/2003
|
Application #:
|
10078842
|
Filing Dt:
|
02/19/2002
|
Title:
|
METHOD FOR LASER THERMAL PROCESSING USING THERMALLY INDUCED REFLECTIVITY SWITCH
|
|
|
Patent #:
|
|
Issue Dt:
|
11/11/2003
|
Application #:
|
10122955
|
Filing Dt:
|
04/11/2002
|
Title:
|
SELECTIVE ABSORPTION PROCESS FOR FORMING AN ACTIVATED DOPED REGION IN A SEMICONDUCTOR
|
|
|
Patent #:
|
|
Issue Dt:
|
05/05/2009
|
Application #:
|
10213868
|
Filing Dt:
|
08/05/2002
|
Title:
|
DUAL-SIDED SUBSTRATE MEASUREMENT APPARATUS AND METHODS
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2004
|
Application #:
|
10287864
|
Filing Dt:
|
11/06/2002
|
Publication #:
|
|
Pub Dt:
|
05/06/2004
| | | | |
Title:
|
LASER SCANNING APPARATUS AND METHODS FOR THERMAL PROCESSING
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2005
|
Application #:
|
10330567
|
Filing Dt:
|
12/27/2002
|
Publication #:
|
|
Pub Dt:
|
07/01/2004
| | | | |
Title:
|
LARGE-FIELD UNIT-MAGNIFICATION PROJECTION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2004
|
Application #:
|
10336066
|
Filing Dt:
|
01/02/2003
|
Publication #:
|
|
Pub Dt:
|
07/08/2004
| | | | |
Title:
|
VARIABLE NUMERICAL APERTURE LARGE-FIELD UNIT-MAGNIFICATION PROJECTION SYSTEM
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2005
|
Application #:
|
10390504
|
Filing Dt:
|
03/13/2003
|
Title:
|
METHOD AND SYSTEM FOR LASER THERMAL PROCESSING OF SEMICONDUCTOR DEVICES
|
|
|
Patent #:
|
|
Issue Dt:
|
01/24/2006
|
Application #:
|
10621415
|
Filing Dt:
|
07/18/2003
|
Publication #:
|
|
Pub Dt:
|
04/22/2004
| | | | |
Title:
|
IMAGING STABILIZATION APPARATUS AND METHOD FOR HIGH-PERFORMANCE OPTICAL SYSTEMS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10650848
|
Filing Dt:
|
08/29/2003
|
Publication #:
|
|
Pub Dt:
|
03/04/2004
| | | | |
Title:
|
Radiation shield device and method
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/2006
|
Application #:
|
10758069
|
Filing Dt:
|
01/14/2004
|
Publication #:
|
|
Pub Dt:
|
07/29/2004
| | | | |
Title:
|
METHOD AND APPARATUS FOR DETERMINING BEST FOCUS USING DARK-FIELD IMAGING
|
|