Patent Assignment Details
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| Reel/Frame: | 014931/0016 | |
| Pages: | 5 |
| | Recorded: | 09/26/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/29/2008
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Application #:
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10472849
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Filing Dt:
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09/26/2003
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Publication #:
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Pub Dt:
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05/20/2004
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Title:
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DEVICE AND CONTROL METHOD FOR MICRO WAVE PLASMA PROCESSING
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Assignees
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| 1-17-301 KOMEGAFUKURO 2-CHOME AOBA-KU |
| SENDAI-SHI |
| MIYAGI 980-0813, JAPAN |
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO 107-8481, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW, ET AL.
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ERNEST F. CHAPMAN
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1300 I STREET, N.W.
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WASHINGTON, D.C. 20005-3315
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