Patent Assignment Details
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| Reel/Frame: | 014998/0645 | |
| Pages: | 3 |
| | Recorded: | 02/17/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10703205
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Filing Dt:
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11/05/2003
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Publication #:
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Pub Dt:
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07/08/2004
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Title:
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Control system and method for improving tracking accuracy of a stage through processing of information from previous operations
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Assignee
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| 2-3 MARUNOUCHI, 3-CHOME |
| CHIYODAS-KU |
| TOKYO, JAPAN 100-8331 |
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Correspondence name and address
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THE LAW OFFICE OF STEVEN G. ROEDER
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STEVEN G. ROEDER
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5560 CHELSEA AVENUE
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LA JOLLA, CA 92037
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04/29/2024 03:51 PM
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