Patent Assignment Details
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| Reel/Frame: | 015045/0502 | |
| Pages: | 7 |
| | Recorded: | 08/04/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/06/2010
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Application #:
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10689547
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Filing Dt:
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10/21/2003
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Publication #:
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Pub Dt:
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09/09/2004
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Title:
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METHODS FOR ADDITIVE REPAIR OF PHASE SHIFT MASKS BY SELECTIVELY DEPOSITING NANOMETER-SCALE ENGINEERED STRUCTURES ON DEFECTIVE PHASE SHIFTERS
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Assignee
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| 1335 WEST RANDOLPH STREET |
| CHICAGO, ILLINOIS 60607 |
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Correspondence name and address
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FOLEY & LARDNER LLP
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J. STEVEN RUTT
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WASHINGTON HARBOUR
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3000 K STREET, N.W., SUITE 500
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WASHINGTON, DC 20007-5143
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