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Total properties:
29
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|
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|
Patent #:
|
|
Issue Dt:
|
05/20/2003
|
Application #:
|
09325835
|
Filing Dt:
|
06/04/1999
|
|
Title:
|
HIGH FLOW CONDUCTANCE AND HIGH THERMAL CONDUCTANCE SHOWERHEAD SYSTEM AND METHOD
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|
|
|
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Patent #:
|
|
Issue Dt:
|
12/17/2002
|
Application #:
|
09520107
|
Filing Dt:
|
03/07/2000
|
|
Title:
|
MULTILAYERED DIFFUSION BARRIER STRUCTURE FOR IMPROVING ADHESION PROPERTY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/03/2002
|
Application #:
|
09520108
|
Filing Dt:
|
03/07/2000
|
|
Title:
|
THREE-DIMENSIONAL SHOWERHEAD APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/24/2001
|
Application #:
|
09589625
|
Filing Dt:
|
06/07/2000
|
|
Title:
|
Multi-thermal zone shielding apparatus
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/03/2002
|
Application #:
|
09589632
|
Filing Dt:
|
06/07/2000
|
|
Title:
|
LIQUID DELIVERY SYSTEM EMULSIFIOR
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/27/2002
|
Application #:
|
09589635
|
Filing Dt:
|
06/07/2000
|
|
Title:
|
REPLACEABLE SHIELDING APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/03/2003
|
Application #:
|
09594887
|
Filing Dt:
|
06/14/2000
|
|
Title:
|
VAPORIZER FOR SENSITIVE PRECURSORS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/03/2003
|
Application #:
|
09596517
|
Filing Dt:
|
06/19/2000
|
|
Title:
|
INTEGRATED PRECURSOR DELIVERY SYSTEM
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/10/2004
|
Application #:
|
09721162
|
Filing Dt:
|
11/22/2000
|
|
Title:
|
PLASMA ENHANCED PULSED LAYER DEPOSITION
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/22/2005
|
Application #:
|
09730690
|
Filing Dt:
|
12/06/2000
|
|
Publication #:
|
|
Pub Dt:
|
06/06/2002
| | | | |
|
Title:
|
REDISTRIBUTING RADIATION GUIDE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/26/2003
|
Application #:
|
09764605
|
Filing Dt:
|
01/17/2001
|
|
Publication #:
|
|
Pub Dt:
|
07/18/2002
| | | | |
|
Title:
|
REMOVABLE LID AND FLOATING PIVOT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/18/2005
|
Application #:
|
09766135
|
Filing Dt:
|
01/19/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/03/2002
| | | | |
|
Title:
|
MULTI-THERMAL ZONE SHIELDING APPARATUS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/26/2003
|
Application #:
|
09840349
|
Filing Dt:
|
04/21/2001
|
|
Publication #:
|
|
Pub Dt:
|
10/24/2002
| | | | |
|
Title:
|
SEMICONDUCTOR PROCESSING SYSTEM AND METHOD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/16/2010
|
Application #:
|
09898439
|
Filing Dt:
|
07/05/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/09/2003
| | | | |
|
Title:
|
PLASMA SEMICONDUCTOR PROCESSING SYSTEM AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/29/2004
|
Application #:
|
09954244
|
Filing Dt:
|
09/10/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/13/2003
| | | | |
|
Title:
|
NANOLAYER THICK FILM PROCESSING SYSTEM AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/04/2003
|
Application #:
|
10195357
|
Filing Dt:
|
07/16/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/05/2002
| | | | |
|
Title:
|
REPLACEABLE SHIELDING APPARATUS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10212545
|
Filing Dt:
|
08/06/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/25/2004
| | | | |
|
Title:
|
Assembly line processing system
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/26/2006
|
Application #:
|
10212546
|
Filing Dt:
|
08/06/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/12/2004
| | | | |
|
Title:
|
ASSEMBLY LINE PROCESSING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/26/2005
|
Application #:
|
10212547
|
Filing Dt:
|
08/06/2002
|
|
Publication #:
|
|
Pub Dt:
|
02/12/2004
| | | | |
|
Title:
|
method and system for sequential processing in a two-compartment chamber
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/22/2005
|
Application #:
|
10213003
|
Filing Dt:
|
08/06/2002
|
|
Title:
|
TWO-COMPARTMENT CHAMBER FOR SEQUENTIAL PROCESSING
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2004
|
Application #:
|
10225920
|
Filing Dt:
|
08/23/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
|
Title:
|
MULTILAYERED COPPER STRUCTURE FOR IMPROVING ADHESION PROPERTY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/30/2003
|
Application #:
|
10292929
|
Filing Dt:
|
11/13/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/17/2003
| | | | |
|
Title:
|
MULTILAYERED DIFFUSION BARRIER STRUCTURE FOR IMPROVING ADHESION PROPERTY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/19/2005
|
Application #:
|
10360133
|
Filing Dt:
|
02/04/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/05/2004
| | | | |
|
Title:
|
METHOD TO DEPOSIT AN IMPERMEABLE FILM ON POROUS LOW-K DIELECTRIC FILM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/16/2007
|
Application #:
|
10360134
|
Filing Dt:
|
02/04/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/05/2004
| | | | |
|
Title:
|
METHOD TO PLASMA DEPOSIT ON ORGANIC POLYMER DIELECTRIC FILM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/2010
|
Application #:
|
10360135
|
Filing Dt:
|
02/04/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/05/2004
| | | | |
|
Title:
|
NANOLAYER DEPOSITION PROCESS
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10403211
|
Filing Dt:
|
04/01/2003
|
|
Publication #:
|
|
Pub Dt:
|
02/17/2005
| | | | |
|
Title:
|
Semiconductor processing system and method
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10434376
|
Filing Dt:
|
05/09/2003
|
|
Publication #:
|
|
Pub Dt:
|
10/23/2003
| | | | |
|
Title:
|
Integrated precursor delivery system
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/11/2006
|
Application #:
|
10617928
|
Filing Dt:
|
07/10/2003
|
|
Publication #:
|
|
Pub Dt:
|
01/15/2004
| | | | |
|
Title:
|
REMOVABLE LID AND FLOATING PIVOT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/03/2006
|
Application #:
|
10636020
|
Filing Dt:
|
08/07/2003
|
|
Publication #:
|
|
Pub Dt:
|
11/24/2005
| | | | |
|
Title:
|
REPLACEABLE SHIELDING APPARATUS
|
|
