Patent Assignment Details
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| Reel/Frame: | 015150/0189 | |
| Pages: | 4 |
| | Recorded: | 07/08/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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10120767
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Filing Dt:
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04/10/2002
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Publication #:
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Pub Dt:
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10/16/2003
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Title:
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METHOD AND APPARATUS FOR DETECTION OF CHEMICAL MECHANICAL PLANARIZATION ENDPOINT AND DEVICE PLANARITY
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Assignee
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| 555 UNION BOULEVARD, SUITE 105 |
| ALLENTOWN, PENNSYLVANIA 18109 |
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Correspondence name and address
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BEUSSE BROWNLEE BOWDOIN & WOLTER, P.A.
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ROBERT L. WOLTER, ESQ.
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390 N. ORANGE AVE., STE. 2500
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ORLANDO, FL 32801
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