Patent Assignment Details
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Reel/Frame: | 015180/0600 | |
| Pages: | 3 |
| | Recorded: | 04/01/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/24/2006
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Application #:
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10816289
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Filing Dt:
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04/01/2004
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Publication #:
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Pub Dt:
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10/07/2004
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Title:
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WAFER PLATEN EQUIPPED WITH ELECTROSTATIC CLAMP, WAFER BACKSIDE GAS COOLING, AND HIGH VOLTAGE OPERATION CAPABILITY FOR PLASMA DOPING
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Assignee
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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Correspondence name and address
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MARK SUERKO
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35 DORY ROAD
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GLOUCESTER, MA 01930
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