Patent Assignment Details
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| Reel/Frame: | 015210/0010 | |
| Pages: | 3 |
| | Recorded: | 04/14/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10715523
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Filing Dt:
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11/19/2003
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Publication #:
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Pub Dt:
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07/29/2004
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Title:
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Plasma processing apparatus and plasma processing method
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Assignee
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU, |
| TOKYO, JAPAN |
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Correspondence name and address
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FINNEGAN HENDERSON ET AL
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ERNEST F. CHAPMAN
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1300 I ST,NW
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WASH DC 20005-3315
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