Patent Assignment Details
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| Reel/Frame: | 015228/0593 | |
| Pages: | 3 |
| | Recorded: | 04/14/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10825022
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Filing Dt:
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04/14/2004
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Publication #:
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Pub Dt:
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10/20/2005
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Title:
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FEEDFORWARD CONTROL WITH REDUCED LEARNING TIME FOR LITHOGRAPHIC SYSTEM TO IMPROVE THROUGHPUT AND ACCURACY
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Assignee
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| 2-3 MARUNOUCHI, 3-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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Correspondence name and address
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TOWNSEND AND TOWNSEND AND CREW LLP
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CHUN-POK LEUNG
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TWO EMBARCADERO CENTER, EIGHTH FLOOR
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SAN FRANCISCO, CALIFORNIA 94111-3834
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