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Total properties:
14
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Patent #:
|
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Issue Dt:
|
07/05/2005
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Application #:
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10103015
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Filing Dt:
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03/22/2002
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Publication #:
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Pub Dt:
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09/25/2003
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Title:
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APPARATUS AND METHOD FOR ELECTROLESS DEPOSITION OF MATERIALS ON SEMICONDUCTOR SUBSTRATES
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Patent #:
|
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Issue Dt:
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01/25/2005
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Application #:
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10242331
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Filing Dt:
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09/13/2002
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Publication #:
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Pub Dt:
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03/18/2004
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Title:
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METHOD AND APPARATUS FOR ELECTROLESS DEPOSITION WITH TEMPERATURE-CONTROLLED CHUCK
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Patent #:
|
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Issue Dt:
|
06/21/2005
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Application #:
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10247895
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Filing Dt:
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09/20/2002
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Publication #:
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Pub Dt:
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05/06/2004
| | | | |
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Title:
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TEMPERATURE-CONTROLLED SUBSTRATE HOLDER FOR PROCESSING IN FLUIDS
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Patent #:
|
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Issue Dt:
|
09/06/2005
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Application #:
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10299069
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Filing Dt:
|
11/19/2002
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Publication #:
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Pub Dt:
|
05/20/2004
| | | | |
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Title:
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SPATIALLY-ARRANGED CHEMICAL PROCESSING STATION
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Patent #:
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Issue Dt:
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06/26/2007
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Application #:
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10299070
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Filing Dt:
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11/19/2002
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Publication #:
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Pub Dt:
|
05/20/2004
| | | | |
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Title:
|
Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth
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|
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Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10299074
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Filing Dt:
|
11/19/2002
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|
Publication #:
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Pub Dt:
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05/20/2004
| | | | |
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Title:
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Method and apparatus for uniform treatment of objects in liquids
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|
|
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Patent #:
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|
Issue Dt:
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06/28/2005
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Application #:
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10339260
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Filing Dt:
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01/10/2003
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Publication #:
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Pub Dt:
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07/15/2004
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Title:
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SOLUTION COMPOSITION AND METHOD FOR ELECTROLESS DEPOSITION OF COATINGS FREE OF ALKALI METALS
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|
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Patent #:
|
|
Issue Dt:
|
09/21/2004
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Application #:
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10345134
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Filing Dt:
|
05/05/2003
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Title:
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METHOD FOR ELECTROLESS DEPOSITION OF PHOSPHORUS-CONTAINING METAL FILMS ONTO COPPER WITH PALLADIUM-FREE ACTIVATION
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|
|
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Patent #:
|
|
Issue Dt:
|
08/30/2005
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Application #:
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10369878
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Filing Dt:
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02/21/2003
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Publication #:
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Pub Dt:
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08/26/2004
| | | | |
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Title:
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UNIVERSAL SUBSTRATE HOLDER FOR TREATING OBJECTS IN FLUIDS
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|
|
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Patent #:
|
|
Issue Dt:
|
06/07/2005
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Application #:
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10379692
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Filing Dt:
|
03/06/2003
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|
Publication #:
|
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Pub Dt:
|
09/09/2004
| | | | |
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Title:
|
ACTIVATION-FREE ELECTROLESS SOLUTION FOR DEPOSITION OF COBALT AND METHOD FOR DEPOSITION OF COBALT CAPPING/PASSIVATION LAYER ON COPPER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/19/2005
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Application #:
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10462167
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Filing Dt:
|
06/16/2003
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|
Publication #:
|
|
Pub Dt:
|
12/16/2004
| | | | |
|
Title:
|
METHODS AND SYSTEM FOR PROCESSING A MICROELECTRONIC TOPOGRAPHY
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/01/2005
|
Application #:
|
10462180
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Filing Dt:
|
06/16/2003
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|
Publication #:
|
|
Pub Dt:
|
12/16/2004
| | | | |
|
Title:
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MICROELECTRONIC FABRICATION SYSTEM COMPONENTS AND METHOD FOR PROCESSING A WAFER USING SUCH COMPONENTS
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|
|
|
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Patent #:
|
|
Issue Dt:
|
02/08/2011
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Application #:
|
10462343
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Filing Dt:
|
06/16/2003
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|
Publication #:
|
|
Pub Dt:
|
12/16/2004
| | | | |
|
Title:
|
METHOD FOR STRENGTHENING ADHESION BETWEEN DIELECTRIC LAYERS FORMED ADJACENT TO METAL LAYERS
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|
|
|
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Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10624397
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Filing Dt:
|
07/22/2003
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|
Publication #:
|
|
Pub Dt:
|
01/27/2005
| | | | |
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Title:
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Multi-staged heating system for fabricating microelectronic devices
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|
