Patent Assignment Details
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| Reel/Frame: | 015364/0602 | |
| Pages: | 5 |
| | Recorded: | 05/25/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/16/2008
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Application #:
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10736782
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Filing Dt:
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12/17/2003
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Publication #:
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Pub Dt:
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09/23/2004
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Title:
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METHOD AND APPARATUS FOR BILAYER PHOTORESIST DRY DEVELOPMENT
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Assignee
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107 |
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Correspondence name and address
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PILLSBURY WINTHROP LLP
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JEFFREY D. KARCESKI
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P.O. BOX 10500
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MCLEAN, VA 22102
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