Patent Assignment Details
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Reel/Frame: | 015545/0746 | |
| Pages: | 2 |
| | Recorded: | 01/10/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10966655
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Filing Dt:
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10/14/2004
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Publication #:
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Pub Dt:
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05/19/2005
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Title:
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Removal of post etch residues and copper contamination from low-k dielectrics using supercritical CO2 with diketone additives
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Assignee
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2520 BARRINGTON COURT |
HAYWARD, CALIFORNIA 94545 |
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Correspondence name and address
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JAMES S. MCDONALD
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3000 EL CAMINO REAL, SUITE 700
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2 PALO ALTO SQUARE
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PALO ALTO, CA 94306
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