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Reel/Frame:015545/0746   Pages: 2
Recorded: 01/10/2005
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10966655
Filing Dt:
10/14/2004
Publication #:
Pub Dt:
05/19/2005
Title:
Removal of post etch residues and copper contamination from low-k dielectrics using supercritical CO2 with diketone additives
Assignor
1
Exec Dt:
12/21/2004
Assignee
1
2520 BARRINGTON COURT
HAYWARD, CALIFORNIA 94545
Correspondence name and address
JAMES S. MCDONALD
3000 EL CAMINO REAL, SUITE 700
2 PALO ALTO SQUARE
PALO ALTO, CA 94306

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