Patent Assignment Details
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| Reel/Frame: | 015546/0279 | |
| Pages: | 2 |
| | Recorded: | 06/30/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10882464
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Filing Dt:
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06/30/2004
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Publication #:
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Pub Dt:
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01/05/2006
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Title:
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Methods and apparatus for optimal temperature control in a plasma processing system
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Assignee
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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IPSG, P.C.
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ALEXANDER SOUSA
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P.O. BOX 700640
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SAN JOSE, CALIFORNIA 95170-0640
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