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Reel/Frame:015552/0067   Pages: 8
Recorded: 07/12/2004
Attorney Dkt #:23910
Conveyance: CORRECTIVE ASSIGNMENT TO CORRECT SERIAL NUMBER 09632831, 09099389 AND 09956180 NUMBER SHOULD BE 09632631, 09627533 AND 09956160. PREVIOUSLY RECORDED ON REEL 014601 FRAME 0343.
Total properties: 25
1
Patent #:
6307635
Issue Dt:
10/23/2001
Application #:
09176617
Filing Dt:
10/21/1998
Title:
PHASE-SHIFTING POINT DIFFRACTION INTERFEROMETER MASK DESIGNS
2
Patent #:
6195169
Issue Dt:
02/27/2001
Application #:
09176695
Filing Dt:
10/21/1998
Title:
PHASE-SHIFTING POINT DIFFRACTION INTERFEROMETER GRATING DESIGNS
3
Patent #:
6341183
Issue Dt:
01/22/2002
Application #:
09181036
Filing Dt:
10/27/1998
Title:
GRAPHICAL USER INTERFACE FOR IMAGE ACQUISITION AND PROCESSING
4
Patent #:
6555828
Issue Dt:
04/29/2003
Application #:
09193198
Filing Dt:
11/17/1998
Title:
METHOD AND APPARATUS FOR INSPECTING REFLECTION MASKS FOR DEFECTS
5
Patent #:
6111646
Issue Dt:
08/29/2000
Application #:
09229449
Filing Dt:
01/12/1999
Title:
NULL TEST FOURIER DOMAIN ALIGNMENT TECHNIQUE FOR PHASE-SHIFTING POINT DIFFRACTION INTERFEROMETER
6
Patent #:
6100978
Issue Dt:
08/08/2000
Application #:
09300539
Filing Dt:
04/27/1999
Title:
DUAL-DOMAIN POINT DIFFRACTION INTERFEROMETER
7
Patent #:
6118535
Issue Dt:
09/12/2000
Application #:
09324903
Filing Dt:
06/02/1999
Title:
IN SITU ALIGNMENT SYSTEM FOR PHASE-SHIFTING POINT-DIFFRACTION INTERFEROMETRY
8
Patent #:
6151115
Issue Dt:
11/21/2000
Application #:
09361780
Filing Dt:
07/26/1999
Title:
PHASE-SHIFTING POINT DIFFRACTION INTERFEROMETER FOCUS-AID ENHANCED MASK
9
Patent #:
6239878
Issue Dt:
05/29/2001
Application #:
09409646
Filing Dt:
10/01/1999
Title:
FOURIER-TRANSFORM AND GLOBAL CONTRAST INTERFEROMETER ALIGNMENT METHODS
10
Patent #:
6266147
Issue Dt:
07/24/2001
Application #:
09419703
Filing Dt:
10/14/1999
Title:
PHASE-SHIFTING POINT DIFFRACTION INTERFEROMETER PHASE GRATING DESIGNS
11
Patent #:
6484306
Issue Dt:
11/19/2002
Application #:
09466730
Filing Dt:
12/17/1999
Title:
MULTI-LEVEL SCANNING METHOD FOR DEFECT INSPECTION
12
Patent #:
6327102
Issue Dt:
12/04/2001
Application #:
09520295
Filing Dt:
03/07/2000
Title:
Miniature self-contained vacuum compatible electronic imaging microscope
13
Patent #:
6559952
Issue Dt:
05/06/2003
Application #:
09569168
Filing Dt:
05/11/2000
Title:
SYSTEM FOR INTERFEROMETRIC DISTORTION MEASUREMENTS THAT DEFINE AN OPTICAL PATH
14
Patent #:
6573997
Issue Dt:
06/03/2003
Application #:
09617719
Filing Dt:
07/17/2000
Title:
HYBRID SHEARING AND PHASE-SHIFTING POINT DIFFRACTION INTERFEROMETER
15
Patent #:
6233056
Issue Dt:
05/15/2001
Application #:
09627533
Filing Dt:
07/28/2000
Title:
Interferometric at-wavelength flare characterization of EUV optical systems
16
Patent #:
6707560
Issue Dt:
03/16/2004
Application #:
09632631
Filing Dt:
08/04/2000
Title:
DUAL-DOMAIN LATEERAL SHEARING INTERFEROMETER
17
Patent #:
6392792
Issue Dt:
05/21/2002
Application #:
09730970
Filing Dt:
12/05/2000
Title:
METHOD OF FABRICATING REFLECTION-MODE EUV DIFFRACTION ELEMENTS
18
Patent #:
6861273
Issue Dt:
03/01/2005
Application #:
09846150
Filing Dt:
04/30/2001
Publication #:
US20020160545
Pub Dt:
10/31/2002
Title:
METHOD OF FABRICATING REFLECTION-MODE EUV DIFFUSERS
19
Patent #:
6963395
Issue Dt:
11/08/2005
Application #:
09902502
Filing Dt:
07/09/2001
Publication #:
US20030043370
Pub Dt:
03/06/2003
Title:
METHOD AND APPARATUS FOR INSPECTING AN EUV MASK BLANK
20
Patent #:
6798494
Issue Dt:
09/28/2004
Application #:
09944391
Filing Dt:
08/30/2001
Publication #:
US20030043359
Pub Dt:
03/06/2003
Title:
APPARATUS FOR GENERATING PARTIALLY COHERENT RADIATION
21
Patent #:
7027226
Issue Dt:
04/11/2006
Application #:
09956160
Filing Dt:
09/17/2001
Publication #:
US20030081316
Pub Dt:
05/01/2003
Title:
DIFFRACTIVE OPTICAL ELEMENT FOR EXTREME ULTRAVIOLET WAVEFRONT CONTROL
22
Patent #:
6927887
Issue Dt:
08/09/2005
Application #:
09981500
Filing Dt:
10/16/2001
Publication #:
US20030072046
Pub Dt:
04/17/2003
Title:
HOLOGRAPHIC ILLUMINATOR FOR SYNCHROTRON-BASED PROJECTION LITHOGRAPHY SYSTEMS
23
Patent #:
6768567
Issue Dt:
07/27/2004
Application #:
10163479
Filing Dt:
06/05/2002
Publication #:
US20030227657
Pub Dt:
12/11/2003
Title:
SYNCHROTRON-BASED EUV LITHOGRAPHY ILLUMINATOR SIMULATOR
24
Patent #:
6859263
Issue Dt:
02/22/2005
Application #:
10377947
Filing Dt:
02/28/2003
Publication #:
US20030174303
Pub Dt:
09/18/2003
Title:
APPARATUS FOR GENERATING PARTIALLY COHERENT RADIATION
25
Patent #:
7016030
Issue Dt:
03/21/2006
Application #:
10689171
Filing Dt:
10/20/2003
Publication #:
US20050083515
Pub Dt:
04/21/2005
Title:
EXTENDED SURFACE PARALLEL COATING INSPECTION METHOD
Assignor
1
REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE
Exec Dt:
12/17/2003
Assignee
1
EUV LLC
2200 MISSION COLLEGE BLVD.
INTEL CORPORATION MAIL STOP SC1-01
SANTA CLARA, CALIFORNIA 95054
Correspondence name and address
FLIESLER MEYER LLP
CHARLES H. JEW
FOUR EMBARADERO CENTER
FOURTH FLOOR
SAN FRANCISCO, CA 94111

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