Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 015580/0407 | |
| Pages: | 13 |
| | Recorded: | 07/22/2004 | | |
| Attorney Dkt #: | KLA1P117X1C/P1151/4 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/09/2007
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Application #:
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10785723
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Filing Dt:
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02/23/2004
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Publication #:
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Pub Dt:
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12/23/2004
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Title:
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APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
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Assignee
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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BEYER WEAVER & THOMAS, LLP
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MARY RAMOS OLYNICK
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P.O. BOX 778
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OAKLAND, CA 94704-0778
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