Patent Assignment Details
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| Reel/Frame: | 015644/0218 | |
| Pages: | 6 |
| | Recorded: | 02/03/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10998394
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Filing Dt:
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11/29/2004
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Publication #:
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Pub Dt:
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06/01/2006
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Title:
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Method and system for performing in-situ cleaning of a deposition system
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Assignee
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TBS BROADCAST CENTER |
| TOKYO, JAPAN 107 |
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Correspondence name and address
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KRISTI L. DAVIDSON
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441 VINE STREET
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2700 CAREW TOWER
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CINCINNATI, OH 45202
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