Total properties:
144
Page
1
of
2
Pages:
1 2
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/18/1996
|
Application #:
|
08340811
|
Filing Dt:
|
11/17/1994
|
|
Title:
|
SYSTEMATIC METHOD FOR PRODUCTION OF PHASE-SHIFTING PHOTOLITHOGRAPHIC MASKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/12/1999
|
Application #:
|
08931921
|
Filing Dt:
|
09/17/1997
|
|
Title:
|
PHASE SHIFTING CIRCUIT MANUFACTURE METHOD AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/29/2004
|
Application #:
|
09130996
|
Filing Dt:
|
08/07/1998
|
|
Publication #:
|
|
Pub Dt:
|
02/14/2002
| | | | |
|
Title:
|
VISUAL INSPECTION AND VERIFICATION SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/22/2002
|
Application #:
|
09153783
|
Filing Dt:
|
09/16/1998
|
|
Title:
|
DESIGN RULE CHECKING SYSTEM AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/17/2002
|
Application #:
|
09154397
|
Filing Dt:
|
09/16/1998
|
|
Title:
|
METHOD AND APPARATUS FOR DATA HIERARCHY MAINTENANCE IN A SYSTEM FOR MASK DESCRIPTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/09/2002
|
Application #:
|
09154415
|
Filing Dt:
|
09/16/1998
|
|
Title:
|
DATA HIERARCHY LAYOUT CORRECTION AND VERIFICATION METHOD AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/08/2001
|
Application #:
|
09229455
|
Filing Dt:
|
01/12/1999
|
|
Title:
|
PHASE SHIFTING CIRCUIT MANUFACTURE METHOD AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/24/2003
|
Application #:
|
09514551
|
Filing Dt:
|
02/28/2000
|
|
Title:
|
METHOD AND APPARATUS FOR MIXED-MODE OPTICAL PROXIMITY CORRECTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/10/2003
|
Application #:
|
09544798
|
Filing Dt:
|
04/07/2000
|
|
Title:
|
METHOD AND APPARATUS FOR A NETWORK-BASED MASK DEFECT PRINTABILITY ANALYSIS SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/10/2001
|
Application #:
|
09617613
|
Filing Dt:
|
07/17/2000
|
|
Title:
|
Phase shifting circuit manufacture method and apparatus
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/18/2003
|
Application #:
|
09632080
|
Filing Dt:
|
08/02/2000
|
|
Title:
|
GENERAL PURPOSE SHAPE-BASED LAYOUT PROCESSING SCHEME FOR IC LAYOUT MODIFICATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/07/2003
|
Application #:
|
09669359
|
Filing Dt:
|
09/26/2000
|
|
Title:
|
PHASE SHIFT MASKING FOR COMPLEX PATTERNS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/01/2003
|
Application #:
|
09669367
|
Filing Dt:
|
09/26/2000
|
|
Title:
|
PHASE SHIFT MASK SUB-RESOLUTION ASSIST FEATURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/25/2003
|
Application #:
|
09669368
|
Filing Dt:
|
09/26/2000
|
|
Title:
|
PHASE SHIFT MASKING FOR INTERSECTING LINES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/14/2004
|
Application #:
|
09675197
|
Filing Dt:
|
09/29/2000
|
|
Title:
|
DISSECTION OF EDGES WITH PROJECTION POINTS IN A FABRICATION LAYOUT FOR CORRECTING PROXIMITY EFFECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/25/2003
|
Application #:
|
09675582
|
Filing Dt:
|
09/29/2000
|
|
Title:
|
DISSECTION OF CORNERS IN A FABRICATION LAYOUT FOR CORRECTING PROXIMITY EFFECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/17/2002
|
Application #:
|
09676356
|
Filing Dt:
|
09/29/2000
|
|
Title:
|
SELECTION OF EVALUATION POINT LOCATIONS BASED ON PROXIMITY EFFECTS MODEL AMPLITUDES FOR CORRECTING PROXIMITY EFFECTS IN A FABRICATION LAYOUT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/23/2003
|
Application #:
|
09676375
|
Filing Dt:
|
09/29/2000
|
|
Title:
|
DISSECTION OF PRINTED EDGES FROM A FABRICATION LAYOUT FOR CORRECTING PROXIMITY EFFECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/29/2003
|
Application #:
|
09676400
|
Filing Dt:
|
09/29/2000
|
|
Title:
|
METHOD FOR HIGH YIELD RETICLE FORMATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/16/2003
|
Application #:
|
09728885
|
Filing Dt:
|
12/01/2000
|
|
Title:
|
DISPLACING EDGE SEGMENTS ON A FABRICATION LAYOUT BASED ON PROXIMITY EFFECTS MODEL AMPLITUDES FOR CORRECTING PROXIMITY EFFECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/16/2002
|
Application #:
|
09732407
|
Filing Dt:
|
12/07/2000
|
|
Publication #:
|
|
Pub Dt:
|
04/12/2001
| | | | |
|
Title:
|
PHASE SHIFTING CIRCUIT MANUFACTURE METHOD AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/25/2003
|
Application #:
|
09746369
|
Filing Dt:
|
12/20/2000
|
|
Publication #:
|
|
Pub Dt:
|
06/20/2002
| | | | |
|
Title:
|
STRUCTURE AND METHOD OF CORRECTING PROXIMITY EFFECTS IN A TRI-TONE ATTENUATED PHASE-SHIFTING MASK
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09752809
|
Filing Dt:
|
12/27/2000
|
|
Publication #:
|
|
Pub Dt:
|
01/08/2004
| | | | |
|
Title:
|
Manufacturing integrated circuits
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/22/2003
|
Application #:
|
09810823
|
Filing Dt:
|
03/16/2001
|
|
Publication #:
|
|
Pub Dt:
|
09/19/2002
| | | | |
|
Title:
|
SELF-ALIGNED FABRICATION TECHNIQUE FOR TRI-TONE ATTENUATED PHASE-SHIFTING MASKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/29/2005
|
Application #:
|
09814023
|
Filing Dt:
|
03/20/2001
|
|
Publication #:
|
|
Pub Dt:
|
11/07/2002
| | | | |
|
Title:
|
SYSTEM AND METHOD OF PROVIDING MASK DEFECT PRINTABILITY ANALYSIS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/02/2005
|
Application #:
|
09814025
|
Filing Dt:
|
03/20/2001
|
|
Publication #:
|
|
Pub Dt:
|
11/07/2002
| | | | |
|
Title:
|
SYSTEM AND METHOD OF PROVIDING MASK QUALITY CONTROL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/21/2003
|
Application #:
|
09816619
|
Filing Dt:
|
03/23/2001
|
|
Publication #:
|
|
Pub Dt:
|
09/26/2002
| | | | |
|
Title:
|
BLANK FOR ALTERNATING PSM PHOTOMASK WITH CHARGE DISSIPATION LAYER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/16/2003
|
Application #:
|
09823146
|
Filing Dt:
|
03/29/2001
|
|
Title:
|
CONFLICT SENSITIVE COMPACTION FOR RESOLVING PHASE-SHIFT CONFLICTS IN LAYOUTS FOR PHASE-SHIFTED FEATURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/24/2003
|
Application #:
|
09823380
|
Filing Dt:
|
03/29/2001
|
|
Title:
|
INCREMENTALLY RESOLVED PHASE-SHIFT CONFLICTS IN LAYOUTS FOR PHASE-SHIFTED FEATURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/07/2003
|
Application #:
|
09835313
|
Filing Dt:
|
04/13/2001
|
|
Publication #:
|
|
Pub Dt:
|
10/17/2002
| | | | |
|
Title:
|
GENERATING AN INSTANCE-BASED REPRESENTATION OF A DESIGN HIERARCHY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/20/2002
|
Application #:
|
09839672
|
Filing Dt:
|
04/20/2001
|
|
Publication #:
|
|
Pub Dt:
|
10/11/2001
| | | | |
|
Title:
|
PHASE SHIFTING CIRCUIT MANUFACTURE METHOD AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/03/2003
|
Application #:
|
09843487
|
Filing Dt:
|
04/25/2001
|
|
Publication #:
|
|
Pub Dt:
|
10/03/2002
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR REDUCING INCIDENTAL EXPOSURE BY USING A PHASE SHIFTER WITH A VARIABLE REGULATOR
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/20/2003
|
Application #:
|
09843498
|
Filing Dt:
|
04/25/2001
|
|
Publication #:
|
|
Pub Dt:
|
10/03/2002
| | | | |
|
Title:
|
USING DOUBLE EXPOSURE EFFECTS DURING PHASE SHIFTING TO CONTROL LINE END SHORTENING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/22/2003
|
Application #:
|
09872620
|
Filing Dt:
|
05/31/2001
|
|
Publication #:
|
|
Pub Dt:
|
10/03/2002
| | | | |
|
Title:
|
ALLEVIATING LINE END SHORTENING IN TRANSISTOR ENDCAPS BY EXTENDING PHASE SHIFTERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/27/2003
|
Application #:
|
09876306
|
Filing Dt:
|
06/06/2001
|
|
Publication #:
|
|
Pub Dt:
|
11/07/2002
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR USING PHASE SHIFTER CUTBACKS TO RESOLVE PHASE SHIFTER CONFLICTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/15/2003
|
Application #:
|
09876307
|
Filing Dt:
|
06/06/2001
|
|
Publication #:
|
|
Pub Dt:
|
11/07/2002
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR REDUCING COLOR CONFLICTS DURING TRIM GENERATION FOR PHASE SHIFTERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/18/2003
|
Application #:
|
09905420
|
Filing Dt:
|
07/13/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
|
Title:
|
ALTERNATING PHASE SHIFT MASK DESIGN CONFLICT RESOLUTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/12/2006
|
Application #:
|
09906920
|
Filing Dt:
|
07/16/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/21/2002
| | | | |
|
Title:
|
VISUAL ANALYSIS AND VERIFICATION SYSTEM USING ADVANCED TOOLS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/06/2003
|
Application #:
|
09917526
|
Filing Dt:
|
07/26/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/30/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR ANALYZING A LAYOUT USING AN INSTANCE-BASED REPRESENTATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/16/2003
|
Application #:
|
09917581
|
Filing Dt:
|
07/27/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/30/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR ALLOWING PHASE CONFLICTS IN PHASE SHIFTING MASK AND CHROMELESS PHASE EDGES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/01/2006
|
Application #:
|
09932239
|
Filing Dt:
|
08/17/2001
|
|
Publication #:
|
|
Pub Dt:
|
12/26/2002
| | | | |
|
Title:
|
PHASE CONFLICT RESOLUTION FOR PHOTOLITHOGRAPHIC MASKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/21/2006
|
Application #:
|
09941453
|
Filing Dt:
|
08/28/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/06/2003
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR INDENTIFYING DUMMY FEATURES ON A MASK LAYER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/27/2004
|
Application #:
|
09945012
|
Filing Dt:
|
08/31/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/06/2003
| | | | |
|
Title:
|
MICROLOADING EFFECT CORRECTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/2004
|
Application #:
|
09952896
|
Filing Dt:
|
09/10/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/13/2003
| | | | |
|
Title:
|
MODIFYING A HIERARCHICAL REPRESENTATION OF A CIRCUIT TO PROCESS FEATURES CREATED BY INTERACTIONS BETWEEN CELLS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/18/2004
|
Application #:
|
09953119
|
Filing Dt:
|
09/10/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/13/2003
| | | | |
|
Title:
|
MODIFYING A HIERARCHICAL REPRESENTATION OF A CIRCUIT TO PROCESS COMPOSITE GATES
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09953376
|
Filing Dt:
|
09/14/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/27/2003
| | | | |
|
Title:
|
Shape and look-up table based design rule checking (DRC) for physical verification of integrated circuit layouts
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09960669
|
Filing Dt:
|
09/21/2001
|
|
Publication #:
|
|
Pub Dt:
|
03/27/2003
| | | | |
|
Title:
|
Method and apparatus for visualizing optical proximity correction process information and output
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/08/2005
|
Application #:
|
09972428
|
Filing Dt:
|
10/05/2001
|
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
|
Title:
|
EXPOSURE CONTROL FOR PHASE SHIFTING PHOTOLITHOGRAPHIC MASKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/30/2003
|
Application #:
|
09974507
|
Filing Dt:
|
10/09/2001
|
|
Publication #:
|
|
Pub Dt:
|
04/10/2003
| | | | |
|
Title:
|
SYSTEM AND METHOD FOR CORRECTING 3D EFFECTS IN AN ALTERNATING PHASE-SHIFTING MASK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/24/2004
|
Application #:
|
09975414
|
Filing Dt:
|
10/09/2001
|
|
Publication #:
|
|
Pub Dt:
|
04/10/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR RESOLVING COLORING CONFLICTS BETWEEN PHASE SHIFTERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/20/2004
|
Application #:
|
09996973
|
Filing Dt:
|
11/15/2001
|
|
Publication #:
|
|
Pub Dt:
|
09/12/2002
| | | | |
|
Title:
|
PHASE SHIFTING DESIGN AND LAYOUT FOR STATIC RANDOM ACCESS MEMORY
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/13/2005
|
Application #:
|
10003358
|
Filing Dt:
|
11/14/2001
|
|
Publication #:
|
|
Pub Dt:
|
05/15/2003
| | | | |
|
Title:
|
SIMULATION USING DESIGN GEOMETRY INFORMATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2005
|
Application #:
|
10005615
|
Filing Dt:
|
11/07/2001
|
|
Publication #:
|
|
Pub Dt:
|
05/08/2003
| | | | |
|
Title:
|
METHOD OF INCORPORATING LENS ABERRATION INFORMATION INTO VARIOUS PROCESS FLOWS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/31/2005
|
Application #:
|
10012069
|
Filing Dt:
|
12/05/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/27/2002
| | | | |
|
Title:
|
RESOLVING PHASE-SHIFT CONFLICTS IN LAYOUTS USING WEIGHTED LINKS BETWEEN PHASE SHIFTERS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/13/2004
|
Application #:
|
10016837
|
Filing Dt:
|
12/12/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/12/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR CONTROLLING RIPPLING DURING OPTICAL PROXIMITY CORRECTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/01/2006
|
Application #:
|
10025414
|
Filing Dt:
|
12/18/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/19/2003
| | | | |
|
Title:
|
METHOD FOR PROVIDING FLEXIBLE AND DYNAMIC REPORTING CAPABILITY USING SIMULATION TOOLS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/22/2004
|
Application #:
|
10029041
|
Filing Dt:
|
12/20/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/26/2003
| | | | |
|
Title:
|
FACILITATING MINIMUM SPACING AND/OR WIDTH CONTROL DURING OPTICAL PROXIMITY CORRECTION
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10033054
|
Filing Dt:
|
12/26/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/26/2003
| | | | |
|
Title:
|
System and method for determining manufacturing error enhancement factor
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/02/2003
|
Application #:
|
10033511
|
Filing Dt:
|
12/26/2001
|
|
Publication #:
|
|
Pub Dt:
|
06/26/2003
| | | | |
|
Title:
|
SIMULATION-BASED FEED FORWARD PROCESS CONTROL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/02/2007
|
Application #:
|
10040055
|
Filing Dt:
|
12/31/2001
|
|
Publication #:
|
|
Pub Dt:
|
08/28/2003
| | | | |
|
Title:
|
SHAPE-BASED GEOMETRY ENGINE TO PERFORM SMOOTHING AND OTHER LAYOUT BEAUTIFICATION OPERATIONS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/11/2004
|
Application #:
|
10068513
|
Filing Dt:
|
02/06/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/12/2002
| | | | |
|
Title:
|
PHASE SHIFT MASKING FOR COMPLEX PATTERNS WITH PROXIMITY ADJUSTMENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/22/2005
|
Application #:
|
10074751
|
Filing Dt:
|
02/13/2002
|
|
Publication #:
|
|
Pub Dt:
|
08/14/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS TO FACILITATE AUTO-ALIGNMENT OF IMAGES FOR DEFECT INSPECTION AND DEFECT ANALYSIS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/13/2004
|
Application #:
|
10082697
|
Filing Dt:
|
02/25/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
|
Title:
|
OPTICAL PROXIMITY CORRECTION FOR PHASE SHIFTING PHOTOLITHOGRAPHIC MASKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/07/2004
|
Application #:
|
10085759
|
Filing Dt:
|
02/28/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/05/2002
| | | | |
|
Title:
|
DESIGN AND LAYOUT OF PHASE SHIFTING PHOTOLITHOGRAPHIC MASKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/12/2003
|
Application #:
|
10094487
|
Filing Dt:
|
03/08/2002
|
|
Title:
|
FACILITATING AN ADJUSTABLE LEVEL OF PHASE SHIFTING DURING AN OPTICAL LITHOGRAPHY PROCESS FOR MANUFACTURING AN INTEGRATED CIRCUIT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/2004
|
Application #:
|
10098713
|
Filing Dt:
|
03/15/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/02/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR IDENTIFYING AN IDENTICAL CELL IN AN IC LAYOUT WITH AN EXISTING SOLUTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/10/2008
|
Application #:
|
10098714
|
Filing Dt:
|
03/15/2002
|
|
Publication #:
|
|
Pub Dt:
|
09/18/2003
| | | | |
|
Title:
|
USING A SUGGESTED SOLUTION TO SPEED UP A PROCESS FOR SIMULATING AND CORRECTING AN INTEGRATED CIRCUIT LAYOUT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2004
|
Application #:
|
10099279
|
Filing Dt:
|
03/15/2002
|
|
Publication #:
|
|
Pub Dt:
|
07/25/2002
| | | | |
|
Title:
|
MASK PRODUCT MADE BY SELECTION OF EVALUATION POINT LOCATIONS BASED ON PROXIMITY EFFECTS MODEL AMPLITUDES FOR CORRECTING PROXIMITY EFFECTS IN A FABRICAT LAYOUT
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10116286
|
Filing Dt:
|
04/04/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/09/2003
| | | | |
|
Title:
|
Method and apparatus to facilitate test pattern design for model calibration and proximity correction
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/09/2004
|
Application #:
|
10116660
|
Filing Dt:
|
04/03/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/09/2003
| | | | |
|
Title:
|
AUTOMATED FLOW IN PSM PHASE ASSIGNMENT
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/13/2005
|
Application #:
|
10116661
|
Filing Dt:
|
04/03/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/09/2003
| | | | |
|
Title:
|
SYSTEM AND METHOD TO DETERMINE IMPACT OF LINE END SHORTENING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/01/2004
|
Application #:
|
10116914
|
Filing Dt:
|
04/05/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/09/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR FACILITATING PROCESS-COMPLIANT LAYOUT OPTIMIZATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/2004
|
Application #:
|
10117838
|
Filing Dt:
|
04/08/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/09/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR EXPOSING A WAFER USING MULTIPLE MASKS DURING AN INTEGRATED CIRCUIT MANUFACTURING PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/11/2005
|
Application #:
|
10137828
|
Filing Dt:
|
05/01/2002
|
|
Publication #:
|
|
Pub Dt:
|
11/06/2003
| | | | |
|
Title:
|
METHOD AND SYSTEM FOR SIMULATING RESIST AND ETCH EDGES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/25/2005
|
Application #:
|
10146274
|
Filing Dt:
|
05/15/2002
|
|
Publication #:
|
|
Pub Dt:
|
11/20/2003
| | | | |
|
Title:
|
FACILITATING OPTICAL PROXIMITY EFFECT CORRECTION THROUGH PUPIL FILTERING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/20/2003
|
Application #:
|
10154858
|
Filing Dt:
|
05/24/2002
|
|
Publication #:
|
|
Pub Dt:
|
11/14/2002
| | | | |
|
Title:
|
PHASE SHIFTING CIRCUIT MANUFACTURE METHOD AND APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
12/20/2005
|
Application #:
|
10165550
|
Filing Dt:
|
06/07/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/17/2002
| | | | |
|
Title:
|
DESIGN DATA FORMAT AND HIERARCHY MANAGEMENT FOR PHASE PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/11/2006
|
Application #:
|
10165557
|
Filing Dt:
|
06/07/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/24/2002
| | | | |
|
Title:
|
STANDARD CELL DESIGN INCORPORATING PHASE INFORMATION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/31/2004
|
Application #:
|
10171066
|
Filing Dt:
|
06/11/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/11/2003
| | | | |
|
Title:
|
MODEL-BASED DATA CONVERSION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/08/2008
|
Application #:
|
10173198
|
Filing Dt:
|
06/18/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/23/2003
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR DATA HIERARCHY MAINTENANCE IN A SYSTEM FOR MASK DESCRIPTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/03/2004
|
Application #:
|
10189900
|
Filing Dt:
|
07/03/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/08/2004
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR REDUCING OPTICAL PROXIMITY CORRECTION OUTPUT FILE SIZE
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10194703
|
Filing Dt:
|
07/12/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/27/2003
| | | | |
|
Title:
|
General purpose shape-based layout processing scheme for IC layout modifications
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/14/2006
|
Application #:
|
10208891
|
Filing Dt:
|
07/29/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/29/2004
| | | | |
|
Title:
|
REPETITION RECOGNITION USING SEGMENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/26/2003
|
Application #:
|
10224064
|
Filing Dt:
|
08/20/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/26/2002
| | | | |
|
Title:
|
PHASE SHIFT MASKING FOR "DOUBLE-T" INTERSECTING LINES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/14/2004
|
Application #:
|
10232130
|
Filing Dt:
|
08/30/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/04/2004
| | | | |
|
Title:
|
CONSIDERING MASK WRITER PROPERTIES DURING THE OPTICAL PROXIMITY CORRECTION PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2004
|
Application #:
|
10235458
|
Filing Dt:
|
09/05/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/09/2003
| | | | |
|
Title:
|
PHASE SHIFT MASK LAYOUT PROCESS FOR PATTERNS INCLUDING INTERSECTING LINE SEGMENTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/02/2004
|
Application #:
|
10237883
|
Filing Dt:
|
09/09/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/11/2004
| | | | |
|
Title:
|
HYBRID OPTICAL PROXIMITY CORRECTION FOR ALTERNATING APERTURE PHASE SHIFTING DESIGNS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/25/2005
|
Application #:
|
10240006
|
Filing Dt:
|
09/26/2002
|
|
Publication #:
|
|
Pub Dt:
|
11/13/2003
| | | | |
|
Title:
|
ALTERNATING PHASE SHIFT MASKING FOR MULTIPLE LEVELS OF MASKING RESOLUTION
|
|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
01/25/2005
|
Application #:
|
10240006
|
Filing Dt:
|
09/26/2002
|
|
Publication #:
|
|
Pub Dt:
|
11/13/2003
| | |
PCT #:
|
US0107413
|
|
Title:
|
ALTERNATING PHASE SHIFT MASKING FOR MULTIPLE LEVELS OF MASKING RESOLUTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/09/2006
|
Application #:
|
10243629
|
Filing Dt:
|
09/13/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/18/2004
| | | | |
|
Title:
|
SOFT DEFECT PRINTABILITY SIMULATION AND ANALYSIS FOR MASKS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/17/2004
|
Application #:
|
10244226
|
Filing Dt:
|
09/16/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/16/2003
| | | | |
|
Title:
|
PHASE SHIFT MASK INCLUDING SUB-RESOLUTION ASSIST FEATURES FOR ISOLATED SPACES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/23/2004
|
Application #:
|
10244451
|
Filing Dt:
|
09/16/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/18/2004
| | | | |
|
Title:
|
USING SECOND EXPOSURE TO ASSIST A PSM EXPOSURE IN PRINTING A TIGHT SPACE ADJACENT TO LARGE FEATURE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/19/2004
|
Application #:
|
10253204
|
Filing Dt:
|
09/23/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/25/2004
| | | | |
|
Title:
|
ACCELERATED LAYOUT PROCESSING USING OPC PRE-PROCESSING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/09/2005
|
Application #:
|
10254702
|
Filing Dt:
|
09/25/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/25/2004
| | | | |
|
Title:
|
SELECTIVELY APPLYING RESOLUTION ENHANCEMENT TECHNIQUES TO IMPROVE PERFORMANCE AND MANUFACTURING COST OF INTEGRATED CIRCUITS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/2004
|
Application #:
|
10268874
|
Filing Dt:
|
10/09/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/15/2004
| | | | |
|
Title:
|
PHASE SHIFTING MASK TOPOGRAPHY EFFECT CORRECTION BASED ON NEAR-FIELD IMAGE PROPERTIES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/13/2007
|
Application #:
|
10272104
|
Filing Dt:
|
10/15/2002
|
|
Publication #:
|
|
Pub Dt:
|
03/20/2003
| | | | |
|
Title:
|
ALTERNATING PHASE SHIFT MASK DESIGN CONFLICT RESOLUTION
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/26/2004
|
Application #:
|
10277250
|
Filing Dt:
|
10/21/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/22/2004
| | | | |
|
Title:
|
PERFORMING OPTICAL PROXIMITY CORRECTION ON TRIM-LEVEL SEGMENTS NOT ABUTTING FEATURES TO BE PRINTED
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/28/2006
|
Application #:
|
10282483
|
Filing Dt:
|
10/28/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/29/2004
| | | | |
|
Title:
|
MASK REPAIR USING MULTIPLE EXPOSURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/28/2004
|
Application #:
|
10294253
|
Filing Dt:
|
11/14/2002
|
|
Publication #:
|
|
Pub Dt:
|
04/22/2004
| | | | |
|
Title:
|
METHOD AND APPARATUS FOR USING A COMPLEMENTARY MASK TO CLEAR PHASE CONFLICTS ON A PHASE SHIFTING MASK
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/17/2006
|
Application #:
|
10295160
|
Filing Dt:
|
11/14/2002
|
|
Publication #:
|
|
Pub Dt:
|
08/28/2003
| | | | |
|
Title:
|
CRITICAL DIMENSION CONTROL USING FULL PHASE AND TRIM MASKS
|
|
