Patent Assignment Details
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| Reel/Frame: | 015680/0112 | |
| Pages: | 3 |
| | Recorded: | 08/09/2004 | | |
| Attorney Dkt #: | 8688/ETCH/DRIE/JB |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10914947
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Filing Dt:
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08/09/2004
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Publication #:
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Pub Dt:
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02/09/2006
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Title:
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Multi-frequency plasma enhanced process chamber having a torroidal plasma source
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Assignee
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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ROBERT W. MULCAHY
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P.O. BOX 450-1
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SANTA CLARA, CA 95052
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