Patent Assignment Details
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| Reel/Frame: | 015714/0728 | |
| Pages: | 6 |
| | Recorded: | 08/20/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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10013785
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Filing Dt:
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12/11/2001
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Publication #:
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Pub Dt:
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08/22/2002
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Title:
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METHOD FOR TWO DIMENSIONAL ADAPTIVE PROCESS CONTROL OF CRITICAL DIMENSIONS DURING SPIN COATING PROCESS
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Assignee
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| DE RUN 1110 |
| 5503 LA VELDHOVEN, NETHERLANDS |
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Correspondence name and address
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BLAKELY, SOKOLOFF, TAYLOR ET AL.
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MICHAEL A. BERNADICOU
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12400 WILSHIRE BOULEVARD, 7TH FLOOR
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LOS ANGELES, CA 90025
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