Patent Assignment Details
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Reel/Frame: | 015770/0298 | |
| Pages: | 2 |
| | Recorded: | 09/09/2004 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10845206
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Filing Dt:
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05/14/2004
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Publication #:
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Pub Dt:
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01/06/2005
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Title:
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Stage apparatus, static pressure bearing apparatus, positioning method, exposure apparatus and method for manufacturing device
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Assignees
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3-30-2, SHIMOMARUKO, OHTA-KU |
TOKYO, JAPAN |
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24-14, NISHISHINBASHI 1-CHOME, MINATO-KU |
TOKYO, JAPAN |
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Correspondence name and address
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FITZPATRICK, CELLA, HARPER ET.AL.
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STEVEN E. WARNER
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30 ROCKEFELLER PLAZA
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NEW YORK, NY 10112-3801
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