Patent Assignment Details
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| Reel/Frame: | 015777/0799 | |
| Pages: | 5 |
| | Recorded: | 09/10/2004 | | |
| Attorney Dkt #: | 543822004700 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10812411
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Filing Dt:
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03/30/2004
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Publication #:
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Pub Dt:
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10/13/2005
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Title:
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EUV lithography system and chuck for releasing reticle in a vacuum isolated environment
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Assignee
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| ST.-MARTIN-STR. 53 |
| 81669 MUNCHEN, GERMANY |
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Correspondence name and address
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MORRISON & FOERSTER LLP
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KEVIN R. SPIVAK
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2000 PENNSYLVANIA AVENUE
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WASHINGTON, DC 20006
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